JPH0189742U - - Google Patents
Info
- Publication number
- JPH0189742U JPH0189742U JP18584087U JP18584087U JPH0189742U JP H0189742 U JPH0189742 U JP H0189742U JP 18584087 U JP18584087 U JP 18584087U JP 18584087 U JP18584087 U JP 18584087U JP H0189742 U JPH0189742 U JP H0189742U
- Authority
- JP
- Japan
- Prior art keywords
- boat
- annealing
- shelves
- annealed
- reaction tube
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000137 annealing Methods 0.000 claims description 3
- 150000001875 compounds Chemical class 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 235000012431 wafers Nutrition 0.000 claims 1
Description
第１図は本考案の実施例を示す。
１……反応管、２……アニールボート、３……
水平棚。
水平棚。
Claims (1)
- 【実用新案登録請求の範囲】 (1) 化合物半導体ウエハをその蒸気圧の高い元
素を含むガス中で熱処理するときに用いるアニー
ルボートであつて、反応管長さ方向に棚を多段に
配置したアニールボート。 (2) 棚と棚との間隔が２mmまたはそれ以下とし
た実用新案登録請求の範囲第１項記載のアニール
ボート。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18584087U JPH0189742U (ja) | 1987-12-05 | 1987-12-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18584087U JPH0189742U (ja) | 1987-12-05 | 1987-12-05 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0189742U true JPH0189742U (ja) | 1989-06-13 |
Family
ID=31477102
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18584087U Pending JPH0189742U (ja) | 1987-12-05 | 1987-12-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0189742U (ja) |
-
1987
- 1987-12-05 JP JP18584087U patent/JPH0189742U/ja active Pending
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