JPH0189742U - - Google Patents

Info

Publication number
JPH0189742U
JPH0189742U JP18584087U JP18584087U JPH0189742U JP H0189742 U JPH0189742 U JP H0189742U JP 18584087 U JP18584087 U JP 18584087U JP 18584087 U JP18584087 U JP 18584087U JP H0189742 U JPH0189742 U JP H0189742U
Authority
JP
Japan
Prior art keywords
boat
annealing
shelves
annealed
reaction tube
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18584087U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP18584087U priority Critical patent/JPH0189742U/ja
Publication of JPH0189742U publication Critical patent/JPH0189742U/ja
Pending legal-status Critical Current

Links

Description

【図面の簡単な説明】
第１図は本考案の実施例を示す。 １……反応管、２……アニールボート、３……
水平棚。

Claims (1)

  1. 【実用新案登録請求の範囲】 (1) 化合物半導体ウエハをその蒸気圧の高い元
    素を含むガス中で熱処理するときに用いるアニー
    ルボートであつて、反応管長さ方向に棚を多段に
    配置したアニールボート。 (2) 棚と棚との間隔が２mmまたはそれ以下とし
    た実用新案登録請求の範囲第１項記載のアニール
    ボート。
JP18584087U 1987-12-05 1987-12-05 Pending JPH0189742U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18584087U JPH0189742U (ja) 1987-12-05 1987-12-05

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18584087U JPH0189742U (ja) 1987-12-05 1987-12-05

Publications (1)

Publication Number Publication Date
JPH0189742U true JPH0189742U (ja) 1989-06-13

Family

ID=31477102

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18584087U Pending JPH0189742U (ja) 1987-12-05 1987-12-05

Country Status (1)

Country Link
JP (1) JPH0189742U (ja)

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