JPH017728Y2 - - Google Patents

Info

Publication number
JPH017728Y2
JPH017728Y2 JP1982088747U JP8874782U JPH017728Y2 JP H017728 Y2 JPH017728 Y2 JP H017728Y2 JP 1982088747 U JP1982088747 U JP 1982088747U JP 8874782 U JP8874782 U JP 8874782U JP H017728 Y2 JPH017728 Y2 JP H017728Y2
Authority
JP
Japan
Prior art keywords
chamber
powdered
gas
film forming
forming apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1982088747U
Other languages
English (en)
Japanese (ja)
Other versions
JPS58192943U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8874782U priority Critical patent/JPS58192943U/ja
Publication of JPS58192943U publication Critical patent/JPS58192943U/ja
Application granted granted Critical
Publication of JPH017728Y2 publication Critical patent/JPH017728Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Photoreceptors In Electrophotography (AREA)
  • Silicon Compounds (AREA)
  • Chemical Vapour Deposition (AREA)
JP8874782U 1982-06-16 1982-06-16 アモルフアスシリコン感光体の成膜装置 Granted JPS58192943U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8874782U JPS58192943U (ja) 1982-06-16 1982-06-16 アモルフアスシリコン感光体の成膜装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8874782U JPS58192943U (ja) 1982-06-16 1982-06-16 アモルフアスシリコン感光体の成膜装置

Publications (2)

Publication Number Publication Date
JPS58192943U JPS58192943U (ja) 1983-12-22
JPH017728Y2 true JPH017728Y2 (enrdf_load_stackoverflow) 1989-03-01

Family

ID=30097407

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8874782U Granted JPS58192943U (ja) 1982-06-16 1982-06-16 アモルフアスシリコン感光体の成膜装置

Country Status (1)

Country Link
JP (1) JPS58192943U (enrdf_load_stackoverflow)

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5889944A (ja) * 1981-11-26 1983-05-28 Canon Inc プラズマｃｖｄ装置
JPS58100671A (ja) * 1981-12-11 1983-06-15 Canon Inc 微粉末捕獲装置を備えたプラズマｃｖｄ装置
JPS58109132A (ja) * 1981-12-22 1983-06-29 Canon Inc 微粉末捕獲装置を備えたプラズマｃｖｄ装置

Also Published As

Publication number Publication date
JPS58192943U (ja) 1983-12-22

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