JPH0163061U - - Google Patents
Info
- Publication number
- JPH0163061U JPH0163061U JP1987157780U JP15778087U JPH0163061U JP H0163061 U JPH0163061 U JP H0163061U JP 1987157780 U JP1987157780 U JP 1987157780U JP 15778087 U JP15778087 U JP 15778087U JP H0163061 U JPH0163061 U JP H0163061U
- Authority
- JP
- Japan
- Prior art keywords
- scanning electrode
- slit
- scanning
- scans
- ions
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 150000002500 ions Chemical class 0.000 claims 2
- 238000005468 ion implantation Methods 0.000 claims 1
Description
第１図はこの考案の実施例を示す平面図、第２
図は第１図の一部の斜視図、第３図は従来例の平
面図である。
１…偏向用の電磁石、２…スリツト、２Ａ…ス
リツト溝、３…上下方向用の走査電極、４…水平
方向用の走査電極、５…ターゲツト。
Figure 1 is a plan view showing an embodiment of this invention, Figure 2 is a plan view showing an embodiment of this invention.
The figure is a perspective view of a part of FIG. 1, and FIG. 3 is a plan view of the conventional example. DESCRIPTION OF SYMBOLS 1... Electromagnet for deflection, 2... Slit, 2A... Slit groove, 3... Scanning electrode for vertical direction, 4... Scanning electrode for horizontal direction, 5... Target.
Claims (1)
れたイオンを上下、左右の何れかの一方の方向に
走査する第１の走査電極と、前記第１の走査電極
による走査方向にスリツト溝が延びるスリツトと
、前記スリツトを通過したイオンを、前記第１の
走査電極による走査方向とは異なる他の方向に走
査する第２の走査電極とからなるイオン注入装置
。 a deflecting electromagnet; a first scanning electrode that scans the ions deflected by the electromagnet in one of the vertical and horizontal directions; and a slit groove extending in the scanning direction by the first scanning electrode. An ion implantation device comprising a slit and a second scanning electrode that scans ions that have passed through the slit in a direction different from the scanning direction of the first scanning electrode.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987157780U JPH0163061U (en) | 1987-10-15 | 1987-10-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987157780U JPH0163061U (en) | 1987-10-15 | 1987-10-15 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0163061U true JPH0163061U (en) | 1989-04-24 |
Family
ID=31437520
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987157780U Pending JPH0163061U (en) | 1987-10-15 | 1987-10-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0163061U (en) |
-
1987
- 1987-10-15 JP JP1987157780U patent/JPH0163061U/ja active Pending