JPH01150363U - - Google Patents
Info
- Publication number
- JPH01150363U JPH01150363U JP4625588U JP4625588U JPH01150363U JP H01150363 U JPH01150363 U JP H01150363U JP 4625588 U JP4625588 U JP 4625588U JP 4625588 U JP4625588 U JP 4625588U JP H01150363 U JPH01150363 U JP H01150363U
- Authority
- JP
- Japan
- Prior art keywords
- electrostatic deflector
- ion beam
- deflected
- multipole electrostatic
- ion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005405 multipole Effects 0.000 claims description 8
- 238000010884 ion-beam technique Methods 0.000 claims description 6
- 238000010586 diagram Methods 0.000 description 3
Description
第１図はこの考案の実施例を示す概略説明図、
第２図は従来の装置示す概略説明図、第３図は平
行平板電極で偏向されたイオンビームを、第１、
第２の多重極静電偏向器で偏向するときの状態を
示す斜視図、第４図はイオンビームを第１、第２
の多重極静電偏向器で偏向するときの原理を示す
図式図である。
図において、３……加速器、６……第１の多重
極静電偏向器、７……第２の多重極静電偏向器。
FIG. 1 is a schematic explanatory diagram showing an embodiment of this invention;
Fig. 2 is a schematic explanatory diagram showing a conventional device, and Fig. 3 shows an ion beam deflected by parallel plate electrodes.
A perspective view showing the state when the ion beam is deflected by the second multipole electrostatic deflector.
FIG. 2 is a schematic diagram showing the principle of deflection using a multipole electrostatic deflector. In the figure, 3... accelerator, 6... first multipole electrostatic deflector, 7... second multipole electrostatic deflector.
Claims (1)
いイオンビームを偏向させる第１の多重極静電偏
向器と、この第１の多重極静電偏向器で偏向され
たイオンビームを再び偏向して、出口におけるイ
オンビームの方向と、第１の多重極静電偏向器の
入口におけるイオンビームの方向とを平行にする
第２の多重極静電偏向器と、この第２の多重極静
電偏向器で偏向されたイオンビームを加速する加
速器とを備えたイオン注入装置。 A first multipole electrostatic deflector deflects the ion beam that has not been accelerated after being extracted from the ion source, and the ion beam deflected by the first multipole electrostatic deflector is deflected again to exit. a second multipole electrostatic deflector which parallels the direction of the ion beam at the entrance of the first multipole electrostatic deflector; An ion implanter equipped with an accelerator that accelerates a deflected ion beam.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4625588U JPH01150363U (en) | 1988-04-07 | 1988-04-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4625588U JPH01150363U (en) | 1988-04-07 | 1988-04-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01150363U true JPH01150363U (en) | 1989-10-18 |
Family
ID=31272530
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4625588U Pending JPH01150363U (en) | 1988-04-07 | 1988-04-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01150363U (en) |
-
1988
- 1988-04-07 JP JP4625588U patent/JPH01150363U/ja active Pending
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