JPH0158021B2 - - Google Patents

Info

Publication number
JPH0158021B2
JPH0158021B2 JP17838984A JP17838984A JPH0158021B2 JP H0158021 B2 JPH0158021 B2 JP H0158021B2 JP 17838984 A JP17838984 A JP 17838984A JP 17838984 A JP17838984 A JP 17838984A JP H0158021 B2 JPH0158021 B2 JP H0158021B2
Authority
JP
Japan
Prior art keywords
station
track
transport
loop
empty
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP17838984A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6156859A (ja
Inventor
Keiichi Shibata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP17838984A priority Critical patent/JPS6156859A/ja
Publication of JPS6156859A publication Critical patent/JPS6156859A/ja
Publication of JPH0158021B2 publication Critical patent/JPH0158021B2/ja
Granted legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q7/00—Arrangements for handling work specially combined with or arranged in, or specially adapted for use in connection with, machine tools, e.g. for conveying, loading, positioning, discharging, sorting
    • B23Q7/14—Arrangements for handling work specially combined with or arranged in, or specially adapted for use in connection with, machine tools, e.g. for conveying, loading, positioning, discharging, sorting co-ordinated in production lines
    • B23Q7/1426—Arrangements for handling work specially combined with or arranged in, or specially adapted for use in connection with, machine tools, e.g. for conveying, loading, positioning, discharging, sorting co-ordinated in production lines with work holders not rigidly fixed to the transport devices

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Discharge Of Articles From Conveyors (AREA)
  • Multi-Process Working Machines And Systems (AREA)
JP17838984A 1984-08-29 1984-08-29 搬送方法 Granted JPS6156859A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17838984A JPS6156859A (ja) 1984-08-29 1984-08-29 搬送方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17838984A JPS6156859A (ja) 1984-08-29 1984-08-29 搬送方法

Publications (2)

Publication Number Publication Date
JPS6156859A JPS6156859A (ja) 1986-03-22
JPH0158021B2 true JPH0158021B2 (enrdf_load_stackoverflow) 1989-12-08

Family

ID=16047636

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17838984A Granted JPS6156859A (ja) 1984-08-29 1984-08-29 搬送方法

Country Status (1)

Country Link
JP (1) JPS6156859A (enrdf_load_stackoverflow)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0810723B2 (ja) * 1986-07-24 1996-01-31 株式会社ニコン ウエハ又はウエハキヤリヤの搬送装置
KR970003907B1 (ko) * 1988-02-12 1997-03-22 도오교오 에레구토론 가부시끼 가이샤 기판처리 장치 및 기판처리 방법
JP2519096B2 (ja) * 1988-02-12 1996-07-31 東京エレクトロン株式会社 処理装置及びレジスト処理装置及び処理方法及びレジスト処理方法

Also Published As

Publication number Publication date
JPS6156859A (ja) 1986-03-22

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