JPH0155605B2 - - Google Patents
Info
- Publication number
- JPH0155605B2 JPH0155605B2 JP57079527A JP7952782A JPH0155605B2 JP H0155605 B2 JPH0155605 B2 JP H0155605B2 JP 57079527 A JP57079527 A JP 57079527A JP 7952782 A JP7952782 A JP 7952782A JP H0155605 B2 JPH0155605 B2 JP H0155605B2
- Authority
- JP
- Japan
- Prior art keywords
- base material
- electrodes
- insulator
- piezoelectric
- electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000463 material Substances 0.000 claims description 57
- 239000012212 insulator Substances 0.000 claims description 40
- 239000000758 substrate Substances 0.000 claims description 34
- 238000000605 extraction Methods 0.000 claims description 32
- 238000000034 method Methods 0.000 claims description 10
- 238000004519 manufacturing process Methods 0.000 claims description 9
- 238000007747 plating Methods 0.000 claims description 9
- 239000000853 adhesive Substances 0.000 claims description 4
- 230000001070 adhesive effect Effects 0.000 claims description 4
- 238000010897 surface acoustic wave method Methods 0.000 description 11
- 239000003990 capacitor Substances 0.000 description 8
- 238000010586 diagram Methods 0.000 description 8
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 7
- 230000005284 excitation Effects 0.000 description 6
- 238000005520 cutting process Methods 0.000 description 4
- 239000011810 insulating material Substances 0.000 description 3
- 238000010030 laminating Methods 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000011347 resin Substances 0.000 description 3
- 229920005989 resin Polymers 0.000 description 3
- 229910000679 solder Inorganic materials 0.000 description 3
- 239000000919 ceramic Substances 0.000 description 2
- 238000010304 firing Methods 0.000 description 2
- 238000004806 packaging method and process Methods 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 238000004026 adhesive bonding Methods 0.000 description 1
- 239000011889 copper foil Substances 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000003618 dip coating Methods 0.000 description 1
- 239000003292 glue Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/05—Holders; Supports
- H03H9/10—Mounting in enclosures
- H03H9/1007—Mounting in enclosures for bulk acoustic wave [BAW] devices
- H03H9/1035—Mounting in enclosures for bulk acoustic wave [BAW] devices the enclosure being defined by two sealing substrates sandwiching the piezoelectric layer of the BAW device
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/125—Driving means, e.g. electrodes, coils
- H03H9/13—Driving means, e.g. electrodes, coils for networks consisting of piezoelectric or electrostrictive materials
- H03H9/132—Driving means, e.g. electrodes, coils for networks consisting of piezoelectric or electrostrictive materials characterized by a particular shape
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/46—Filters
- H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
- H03H9/542—Filters comprising resonators of piezoelectric or electrostrictive material including passive elements
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/46—Filters
- H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
- H03H9/56—Monolithic crystal filters
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7952782A JPS58139513A (ja) | 1982-05-11 | 1982-05-11 | チップ状圧電振動部品の製造方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7952782A JPS58139513A (ja) | 1982-05-11 | 1982-05-11 | チップ状圧電振動部品の製造方法 |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2146182A Division JPS58138115A (ja) | 1982-02-12 | 1982-02-12 | チップ状圧電振動部品の製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS58139513A JPS58139513A (ja) | 1983-08-18 |
JPH0155605B2 true JPH0155605B2 (US20030199744A1-20031023-C00003.png) | 1989-11-27 |
Family
ID=13692451
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7952782A Granted JPS58139513A (ja) | 1982-05-11 | 1982-05-11 | チップ状圧電振動部品の製造方法 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS58139513A (US20030199744A1-20031023-C00003.png) |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6082832U (ja) * | 1983-11-15 | 1985-06-08 | 松下電器産業株式会社 | フイルタパツケ−ジ |
CA1281810C (en) * | 1984-02-20 | 1991-03-19 | Stephen P. Rogerson | Mounting of saw devices |
JPS62109420A (ja) * | 1985-11-07 | 1987-05-20 | Alps Electric Co Ltd | 弾性表面波素子 |
JPS62173813A (ja) * | 1986-01-28 | 1987-07-30 | Alps Electric Co Ltd | 弾性表面波素子 |
JPH0779139B2 (ja) * | 1987-01-14 | 1995-08-23 | 日本電気株式会社 | 1チツプsawデバイスの製造方法 |
JPH0349308A (ja) * | 1989-07-17 | 1991-03-04 | Murata Mfg Co Ltd | 弾性表面波フイルタ |
US5453652A (en) * | 1992-12-17 | 1995-09-26 | Matsushita Electric Industrial Co., Ltd. | Surface acoustic wave device with interdigital transducers formed on a holding substrate thereof and a method of producing the same |
JP3275775B2 (ja) * | 1997-05-16 | 2002-04-22 | 株式会社村田製作所 | 弾性表面波装置 |
JP3617368B2 (ja) * | 1999-04-02 | 2005-02-02 | 株式会社村田製作所 | マザー基板および子基板ならびにその製造方法 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5472696A (en) * | 1977-11-21 | 1979-06-11 | Citizen Watch Co Ltd | Package for super miniature size piezoelectric oscillator |
JPS5661820A (en) * | 1979-10-25 | 1981-05-27 | Matsushima Kogyo Co Ltd | Quartz oscillator |
JPS5717124A (en) * | 1980-07-05 | 1982-01-28 | Tdk Electronics Co Ltd | Capacitor and method of producing same |
-
1982
- 1982-05-11 JP JP7952782A patent/JPS58139513A/ja active Granted
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5472696A (en) * | 1977-11-21 | 1979-06-11 | Citizen Watch Co Ltd | Package for super miniature size piezoelectric oscillator |
JPS5661820A (en) * | 1979-10-25 | 1981-05-27 | Matsushima Kogyo Co Ltd | Quartz oscillator |
JPS5717124A (en) * | 1980-07-05 | 1982-01-28 | Tdk Electronics Co Ltd | Capacitor and method of producing same |
Also Published As
Publication number | Publication date |
---|---|
JPS58139513A (ja) | 1983-08-18 |