JPH0153573B2 - - Google Patents
Info
- Publication number
- JPH0153573B2 JPH0153573B2 JP58192515A JP19251583A JPH0153573B2 JP H0153573 B2 JPH0153573 B2 JP H0153573B2 JP 58192515 A JP58192515 A JP 58192515A JP 19251583 A JP19251583 A JP 19251583A JP H0153573 B2 JPH0153573 B2 JP H0153573B2
- Authority
- JP
- Japan
- Prior art keywords
- liquid level
- liquid
- pipe
- pressurized gas
- returnable
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000007788 liquid Substances 0.000 claims description 109
- 239000000126 substance Substances 0.000 claims description 52
- 238000012544 monitoring process Methods 0.000 claims description 36
- 238000000034 method Methods 0.000 claims description 17
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims description 17
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 28
- 239000007789 gas Substances 0.000 description 19
- 238000004519 manufacturing process Methods 0.000 description 13
- 229910052757 nitrogen Inorganic materials 0.000 description 13
- 239000004065 semiconductor Substances 0.000 description 10
- 238000012806 monitoring device Methods 0.000 description 9
- 238000005192 partition Methods 0.000 description 8
- 238000010586 diagram Methods 0.000 description 6
- 229940079593 drug Drugs 0.000 description 6
- 239000003814 drug Substances 0.000 description 6
- 239000011521 glass Substances 0.000 description 5
- 230000007423 decrease Effects 0.000 description 3
- 238000009826 distribution Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- -1 polypropylene Polymers 0.000 description 3
- 238000012546 transfer Methods 0.000 description 3
- 239000004743 Polypropylene Substances 0.000 description 2
- 239000004809 Teflon Substances 0.000 description 2
- 229920006362 Teflon® Polymers 0.000 description 2
- 238000011109 contamination Methods 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 229910001873 dinitrogen Inorganic materials 0.000 description 2
- 239000000428 dust Substances 0.000 description 2
- 238000007689 inspection Methods 0.000 description 2
- 229920001155 polypropylene Polymers 0.000 description 2
- 238000003860 storage Methods 0.000 description 2
- 241000102542 Kara Species 0.000 description 1
- 239000004698 Polyethylene Substances 0.000 description 1
- 238000012993 chemical processing Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 239000012776 electronic material Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- JEIPFZHSYJVQDO-UHFFFAOYSA-N iron(III) oxide Inorganic materials O=[Fe]O[Fe]=O JEIPFZHSYJVQDO-UHFFFAOYSA-N 0.000 description 1
- 230000009021 linear effect Effects 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 229920000573 polyethylene Polymers 0.000 description 1
- 229920000915 polyvinyl chloride Polymers 0.000 description 1
- 239000004800 polyvinyl chloride Substances 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000003908 quality control method Methods 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 238000010129 solution processing Methods 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J4/00—Feed or outlet devices; Feed or outlet control devices
- B01J4/008—Feed or outlet control devices
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
- Weting (AREA)
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19251583A JPS6084137A (ja) | 1983-10-17 | 1983-10-17 | 密閉型通い缶からの薬液供給看視装置 |
| US06/660,412 US4676404A (en) | 1983-10-17 | 1984-10-12 | Method and apparatus for feeding drug liquid from hermetic returnable can |
| KR1019840006391A KR930000225B1 (ko) | 1983-10-17 | 1984-10-16 | 밀폐형 반환식 통으로부터의 약액 공급방법 및 장치 |
| EP19840402079 EP0138718B1 (fr) | 1983-10-17 | 1984-10-16 | Méthode et appareillage pour l'alimentation en liquide de dopage à partir d'un fût hermétique consigné |
| DE8484402079T DE3465970D1 (en) | 1983-10-17 | 1984-10-16 | Method and apparatus for feeding drug liquid from hermetic returnable can |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19251583A JPS6084137A (ja) | 1983-10-17 | 1983-10-17 | 密閉型通い缶からの薬液供給看視装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6084137A JPS6084137A (ja) | 1985-05-13 |
| JPH0153573B2 true JPH0153573B2 (fr) | 1989-11-14 |
Family
ID=16292565
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19251583A Granted JPS6084137A (ja) | 1983-10-17 | 1983-10-17 | 密閉型通い缶からの薬液供給看視装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6084137A (fr) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62183123A (ja) * | 1986-02-06 | 1987-08-11 | Nippon Zeon Co Ltd | 半導体製造用薬液の供給方法 |
| JP5346620B2 (ja) * | 1997-07-11 | 2013-11-20 | アドバンスト テクノロジー マテリアルズ，インコーポレイテッド | バルク化学物質供給システム |
| JP4640947B2 (ja) * | 2005-04-27 | 2011-03-02 | シーケーディ株式会社 | タンク構造 |
| KR101928120B1 (ko) | 2011-05-28 | 2018-12-11 | 엔테그리스, 아이엔씨. | 퍼지 능력을 갖춘 리필 가능한 앰플 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58101732A (ja) * | 1981-12-14 | 1983-06-17 | Nippon Telegr & Teleph Corp <Ntt> | 薬液供給装置 |
-
1983
- 1983-10-17 JP JP19251583A patent/JPS6084137A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58101732A (ja) * | 1981-12-14 | 1983-06-17 | Nippon Telegr & Teleph Corp <Ntt> | 薬液供給装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6084137A (ja) | 1985-05-13 |
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