JPH0153294B2 - - Google Patents

Info

Publication number
JPH0153294B2
JPH0153294B2 JP56082360A JP8236081A JPH0153294B2 JP H0153294 B2 JPH0153294 B2 JP H0153294B2 JP 56082360 A JP56082360 A JP 56082360A JP 8236081 A JP8236081 A JP 8236081A JP H0153294 B2 JPH0153294 B2 JP H0153294B2
Authority
JP
Japan
Prior art keywords
vacuum
vacuum processing
roll
sealing mechanism
vacuum chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP56082360A
Other languages
English (en)
Japanese (ja)
Other versions
JPS57195754A (en
Inventor
Susumu Ueno
Hideaki Kamata
Kyoshi Imada
Yoshitada Hata
Masaya Tokai
Kenichi Kato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin Etsu Chemical Co Ltd
Hitachi Ltd
Original Assignee
Shin Etsu Chemical Co Ltd
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin Etsu Chemical Co Ltd, Hitachi Ltd filed Critical Shin Etsu Chemical Co Ltd
Priority to JP8236081A priority Critical patent/JPS57195754A/ja
Publication of JPS57195754A publication Critical patent/JPS57195754A/ja
Publication of JPH0153294B2 publication Critical patent/JPH0153294B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Treatments Of Macromolecular Shaped Articles (AREA)
  • Physical Vapour Deposition (AREA)
JP8236081A 1981-05-29 1981-05-29 Continuous vacuum treatment apparatus Granted JPS57195754A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8236081A JPS57195754A (en) 1981-05-29 1981-05-29 Continuous vacuum treatment apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8236081A JPS57195754A (en) 1981-05-29 1981-05-29 Continuous vacuum treatment apparatus

Publications (2)

Publication Number Publication Date
JPS57195754A JPS57195754A (en) 1982-12-01
JPH0153294B2 true JPH0153294B2 (enrdf_load_html_response) 1989-11-13

Family

ID=13772406

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8236081A Granted JPS57195754A (en) 1981-05-29 1981-05-29 Continuous vacuum treatment apparatus

Country Status (1)

Country Link
JP (1) JPS57195754A (enrdf_load_html_response)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60224780A (ja) * 1984-04-20 1985-11-09 Kuraray Co Ltd シ−ト状物の真空連続処理装置におけるシ−ル装置
JPS6112867A (ja) * 1984-06-27 1986-01-21 Hitachi Ltd ロール式シール装置
US4763601A (en) * 1987-09-02 1988-08-16 Nippon Steel Corporation Continuous composite coating apparatus for coating strip
KR100880352B1 (ko) 2007-06-01 2009-01-23 (주) 에이알티 가스 유입 방지가 가능한 플렉시블필름의 금속증착처리장치

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50161475A (enrdf_load_html_response) * 1974-06-20 1975-12-27
JPS5730733A (en) * 1980-07-30 1982-02-19 Shin Etsu Chem Co Ltd Device for continuous plasma treatment
JPS5773025A (en) * 1980-10-27 1982-05-07 Shin Etsu Chem Co Ltd Apparatus for continuous vacuum treatment

Also Published As

Publication number Publication date
JPS57195754A (en) 1982-12-01

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