JPH0145223B2 - - Google Patents

Info

Publication number
JPH0145223B2
JPH0145223B2 JP4530984A JP4530984A JPH0145223B2 JP H0145223 B2 JPH0145223 B2 JP H0145223B2 JP 4530984 A JP4530984 A JP 4530984A JP 4530984 A JP4530984 A JP 4530984A JP H0145223 B2 JPH0145223 B2 JP H0145223B2
Authority
JP
Japan
Prior art keywords
dielectric film
electrode
processed
electrostatic chuck
present
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP4530984A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60191735A (ja
Inventor
Noboru Kuryama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokuda Seisakusho Co Ltd
Original Assignee
Tokuda Seisakusho Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokuda Seisakusho Co Ltd filed Critical Tokuda Seisakusho Co Ltd
Priority to JP4530984A priority Critical patent/JPS60191735A/ja
Publication of JPS60191735A publication Critical patent/JPS60191735A/ja
Publication of JPH0145223B2 publication Critical patent/JPH0145223B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Jigs For Machine Tools (AREA)
JP4530984A 1984-03-09 1984-03-09 静電チヤツク Granted JPS60191735A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4530984A JPS60191735A (ja) 1984-03-09 1984-03-09 静電チヤツク

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4530984A JPS60191735A (ja) 1984-03-09 1984-03-09 静電チヤツク

Publications (2)

Publication Number Publication Date
JPS60191735A JPS60191735A (ja) 1985-09-30
JPH0145223B2 true JPH0145223B2 (en, 2012) 1989-10-03

Family

ID=12715709

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4530984A Granted JPS60191735A (ja) 1984-03-09 1984-03-09 静電チヤツク

Country Status (1)

Country Link
JP (1) JPS60191735A (en, 2012)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6286837A (ja) * 1985-10-14 1987-04-21 Tokyo Electron Ltd ウエハ処理装置
JPS6278846A (ja) * 1985-10-01 1987-04-11 Tokyo Electron Ltd 半導体ウエハ処理装置

Also Published As

Publication number Publication date
JPS60191735A (ja) 1985-09-30

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