JPH0142491B2 - - Google Patents

Info

Publication number
JPH0142491B2
JPH0142491B2 JP15032181A JP15032181A JPH0142491B2 JP H0142491 B2 JPH0142491 B2 JP H0142491B2 JP 15032181 A JP15032181 A JP 15032181A JP 15032181 A JP15032181 A JP 15032181A JP H0142491 B2 JPH0142491 B2 JP H0142491B2
Authority
JP
Japan
Prior art keywords
film
zinc
aluminum
electrode
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP15032181A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5851512A (ja
Inventor
Mitsuharu Morishita
Shiro Iwatani
Mitsuaki Nanba
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP15032181A priority Critical patent/JPS5851512A/ja
Publication of JPS5851512A publication Critical patent/JPS5851512A/ja
Publication of JPH0142491B2 publication Critical patent/JPH0142491B2/ja
Granted legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/28Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
    • H01L21/283Deposition of conductive or insulating materials for electrodes conducting electric current
    • H01L21/288Deposition of conductive or insulating materials for electrodes conducting electric current from a liquid, e.g. electrolytic deposition

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Chemically Coating (AREA)
  • Electrodes Of Semiconductors (AREA)
JP15032181A 1981-09-22 1981-09-22 半導体装置の電極形成方法 Granted JPS5851512A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15032181A JPS5851512A (ja) 1981-09-22 1981-09-22 半導体装置の電極形成方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15032181A JPS5851512A (ja) 1981-09-22 1981-09-22 半導体装置の電極形成方法

Publications (2)

Publication Number Publication Date
JPS5851512A JPS5851512A (ja) 1983-03-26
JPH0142491B2 true JPH0142491B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1989-09-13

Family

ID=15494461

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15032181A Granted JPS5851512A (ja) 1981-09-22 1981-09-22 半導体装置の電極形成方法

Country Status (1)

Country Link
JP (1) JPS5851512A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0537715Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1988-02-26 1993-09-24
JP3700563B2 (ja) 2000-09-04 2005-09-28 セイコーエプソン株式会社 バンプの形成方法及び半導体装置の製造方法

Also Published As

Publication number Publication date
JPS5851512A (ja) 1983-03-26

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