JPH0141016B2 - - Google Patents

Info

Publication number
JPH0141016B2
JPH0141016B2 JP57119309A JP11930982A JPH0141016B2 JP H0141016 B2 JPH0141016 B2 JP H0141016B2 JP 57119309 A JP57119309 A JP 57119309A JP 11930982 A JP11930982 A JP 11930982A JP H0141016 B2 JPH0141016 B2 JP H0141016B2
Authority
JP
Japan
Prior art keywords
pattern
forming
photoresist pattern
spacer layer
platinum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP57119309A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5910227A (ja
Inventor
Tadahiro Hashimoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP57119309A priority Critical patent/JPS5910227A/ja
Publication of JPS5910227A publication Critical patent/JPS5910227A/ja
Publication of JPH0141016B2 publication Critical patent/JPH0141016B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P50/00—

Landscapes

  • Weting (AREA)
JP57119309A 1982-07-09 1982-07-09 半導体装置の製造方法 Granted JPS5910227A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57119309A JPS5910227A (ja) 1982-07-09 1982-07-09 半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57119309A JPS5910227A (ja) 1982-07-09 1982-07-09 半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JPS5910227A JPS5910227A (ja) 1984-01-19
JPH0141016B2 true JPH0141016B2 (OSRAM) 1989-09-01

Family

ID=14758235

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57119309A Granted JPS5910227A (ja) 1982-07-09 1982-07-09 半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JPS5910227A (OSRAM)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60236661A (ja) * 1984-05-10 1985-11-25 株式会社クラレ 人工腎臓透析装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5713740A (en) * 1980-06-30 1982-01-23 Fujitsu Ltd Forming method for conductor pattern

Also Published As

Publication number Publication date
JPS5910227A (ja) 1984-01-19

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