JPH0140921B2 - - Google Patents
Info
- Publication number
- JPH0140921B2 JPH0140921B2 JP4759481A JP4759481A JPH0140921B2 JP H0140921 B2 JPH0140921 B2 JP H0140921B2 JP 4759481 A JP4759481 A JP 4759481A JP 4759481 A JP4759481 A JP 4759481A JP H0140921 B2 JPH0140921 B2 JP H0140921B2
- Authority
- JP
- Japan
- Prior art keywords
- hologram
- light
- displacement
- optical element
- meter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000006073 displacement reaction Methods 0.000 claims description 40
- 230000003287 optical effect Effects 0.000 description 52
- 238000010586 diagram Methods 0.000 description 10
- 239000000463 material Substances 0.000 description 10
- 238000005259 measurement Methods 0.000 description 5
- 238000009792 diffusion process Methods 0.000 description 4
- 239000005337 ground glass Substances 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 239000000470 constituent Substances 0.000 description 3
- 238000005210 holographic interferometry Methods 0.000 description 3
- 238000001093 holography Methods 0.000 description 3
- 238000003754 machining Methods 0.000 description 3
- 238000004458 analytical method Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005286 illumination Methods 0.000 description 2
- 230000007423 decrease Effects 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/021—Interferometers using holographic techniques
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Instruments For Measurement Of Length By Optical Means (AREA)
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4759481A JPS57161605A (en) | 1981-03-31 | 1981-03-31 | Homogram displacement gauge |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4759481A JPS57161605A (en) | 1981-03-31 | 1981-03-31 | Homogram displacement gauge |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS57161605A JPS57161605A (en) | 1982-10-05 |
| JPH0140921B2 true JPH0140921B2 (enrdf_load_stackoverflow) | 1989-09-01 |
Family
ID=12779568
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4759481A Granted JPS57161605A (en) | 1981-03-31 | 1981-03-31 | Homogram displacement gauge |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS57161605A (enrdf_load_stackoverflow) |
-
1981
- 1981-03-31 JP JP4759481A patent/JPS57161605A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS57161605A (en) | 1982-10-05 |