JPH0140285B2 - - Google Patents
Info
- Publication number
- JPH0140285B2 JPH0140285B2 JP17861580A JP17861580A JPH0140285B2 JP H0140285 B2 JPH0140285 B2 JP H0140285B2 JP 17861580 A JP17861580 A JP 17861580A JP 17861580 A JP17861580 A JP 17861580A JP H0140285 B2 JPH0140285 B2 JP H0140285B2
- Authority
- JP
- Japan
- Prior art keywords
- light
- hologram
- movable body
- interference fringes
- movement path
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000003287 optical effect Effects 0.000 claims description 31
- 238000006073 displacement reaction Methods 0.000 claims description 10
- 230000000694 effects Effects 0.000 description 5
- 230000015572 biosynthetic process Effects 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 238000005210 holographic interferometry Methods 0.000 description 3
- 238000001093 holography Methods 0.000 description 3
- 238000003754 machining Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- 239000005338 frosted glass Substances 0.000 description 2
- 238000005305 interferometry Methods 0.000 description 2
- 238000013459 approach Methods 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 230000002452 interceptive effect Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
- G01B11/306—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces for measuring evenness
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Instruments For Measurement Of Length By Optical Means (AREA)
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17861580A JPS57101706A (en) | 1980-12-17 | 1980-12-17 | Hologram linearity meter provided with reflecting element |
| US06/322,460 US4466693A (en) | 1980-11-25 | 1981-11-18 | Holographic straightness meter |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17861580A JPS57101706A (en) | 1980-12-17 | 1980-12-17 | Hologram linearity meter provided with reflecting element |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS57101706A JPS57101706A (en) | 1982-06-24 |
| JPH0140285B2 true JPH0140285B2 (enrdf_load_stackoverflow) | 1989-08-28 |
Family
ID=16051534
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17861580A Granted JPS57101706A (en) | 1980-11-25 | 1980-12-17 | Hologram linearity meter provided with reflecting element |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS57101706A (enrdf_load_stackoverflow) |
-
1980
- 1980-12-17 JP JP17861580A patent/JPS57101706A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS57101706A (en) | 1982-06-24 |