JPS57101706A - Hologram linearity meter provided with reflecting element - Google Patents

Hologram linearity meter provided with reflecting element

Info

Publication number
JPS57101706A
JPS57101706A JP17861580A JP17861580A JPS57101706A JP S57101706 A JPS57101706 A JP S57101706A JP 17861580 A JP17861580 A JP 17861580A JP 17861580 A JP17861580 A JP 17861580A JP S57101706 A JPS57101706 A JP S57101706A
Authority
JP
Japan
Prior art keywords
movable member
hologram
interference fringes
reflecting element
linearity
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP17861580A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0140285B2 (enrdf_load_stackoverflow
Inventor
Joji Matsuda
Kouji Tenjinbayashi
Tsuguo Kono
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP17861580A priority Critical patent/JPS57101706A/ja
Priority to US06/322,460 priority patent/US4466693A/en
Publication of JPS57101706A publication Critical patent/JPS57101706A/ja
Publication of JPH0140285B2 publication Critical patent/JPH0140285B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G01B11/306—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces for measuring evenness

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP17861580A 1980-11-25 1980-12-17 Hologram linearity meter provided with reflecting element Granted JPS57101706A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP17861580A JPS57101706A (en) 1980-12-17 1980-12-17 Hologram linearity meter provided with reflecting element
US06/322,460 US4466693A (en) 1980-11-25 1981-11-18 Holographic straightness meter

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17861580A JPS57101706A (en) 1980-12-17 1980-12-17 Hologram linearity meter provided with reflecting element

Publications (2)

Publication Number Publication Date
JPS57101706A true JPS57101706A (en) 1982-06-24
JPH0140285B2 JPH0140285B2 (enrdf_load_stackoverflow) 1989-08-28

Family

ID=16051534

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17861580A Granted JPS57101706A (en) 1980-11-25 1980-12-17 Hologram linearity meter provided with reflecting element

Country Status (1)

Country Link
JP (1) JPS57101706A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0140285B2 (enrdf_load_stackoverflow) 1989-08-28

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