JPH0137725Y2 - - Google Patents
Info
- Publication number
- JPH0137725Y2 JPH0137725Y2 JP20269283U JP20269283U JPH0137725Y2 JP H0137725 Y2 JPH0137725 Y2 JP H0137725Y2 JP 20269283 U JP20269283 U JP 20269283U JP 20269283 U JP20269283 U JP 20269283U JP H0137725 Y2 JPH0137725 Y2 JP H0137725Y2
- Authority
- JP
- Japan
- Prior art keywords
- surface treatment
- treatment agent
- volatile
- substrate
- gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000012756 surface treatment agent Substances 0.000 claims description 35
- 239000007789 gas Substances 0.000 claims description 27
- 239000000758 substrate Substances 0.000 claims description 22
- 229920002120 photoresistant polymer Polymers 0.000 description 15
- MVPPADPHJFYWMZ-UHFFFAOYSA-N chlorobenzene Chemical compound ClC1=CC=CC=C1 MVPPADPHJFYWMZ-UHFFFAOYSA-N 0.000 description 14
- 238000000034 method Methods 0.000 description 8
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 6
- 229910001873 dinitrogen Inorganic materials 0.000 description 6
- 239000007788 liquid Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 239000010408 film Substances 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 238000003908 quality control method Methods 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 238000009423 ventilation Methods 0.000 description 1
Landscapes
- Coating Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20269283U JPS60112380U (ja) | 1983-12-28 | 1983-12-28 | 表面処理剤塗布装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20269283U JPS60112380U (ja) | 1983-12-28 | 1983-12-28 | 表面処理剤塗布装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60112380U JPS60112380U (ja) | 1985-07-30 |
| JPH0137725Y2 true JPH0137725Y2 (enrdf_load_stackoverflow) | 1989-11-14 |
Family
ID=30765130
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP20269283U Granted JPS60112380U (ja) | 1983-12-28 | 1983-12-28 | 表面処理剤塗布装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60112380U (enrdf_load_stackoverflow) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2898318B2 (ja) * | 1989-11-10 | 1999-05-31 | 三菱電機株式会社 | 有機薄膜の形成方法および形成装置 |
-
1983
- 1983-12-28 JP JP20269283U patent/JPS60112380U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60112380U (ja) | 1985-07-30 |
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