JPH0137725Y2 - - Google Patents

Description

[Detailed explanation of the idea] (b) Industrial application fields The present invention relates to a coating device for a surface treatment agent.

(b) Prior art When manufacturing a vapor-deposited thin film having a predetermined shape, for example, a thin-film Josephson device used in a superconducting magnetometer, by the lift-off method, a photoresist is coated on the surface as shown in Figure 1. After first drawing a predetermined pattern on the photoresist substrate (a) coated with photoresist 1 and subjecting it to exposure treatment (b), the surface of photoresist 1 is treated with chlorobenzene, and a hardened layer of photoresist 2 is applied thereto. (c). In the next development process, unnecessary parts of the photoresist are removed.
(d), a superconducting material is deposited (e), and a superconducting deposited film 3 having a predetermined pattern is formed on the portion of the substrate from which the photoresist has been removed. Thereafter, by "lifting off" the residual photoresist having the unnecessary vapor deposited film 3a on its surface, a Josephson device made of the superconducting vapor deposited film 3 is obtained (f).

In the above process, when the surface of the photoresist 1 is treated with chlorobenzene, conventionally the photoresist substrate is immersed in chlorobenzene in an open container in a room with ventilation equipment, or chlorobenzene is applied to the photoresist surface. A method has been used in which the residual chlorobenzene is removed by evaporation using a dryer after a suitable period of time has passed.

However, with this method, there is a risk that the workplace will be filled with harmful and flammable vapors from chlorobenzene, a type II organic solvent, and the method described above does not allow accurate control of photoresist processing time. Therefore, it is impossible to keep the properties of the photoresist hardened layer constant.

(C) Purpose The purpose of the present invention is to eliminate the above-mentioned problems that occur when a surface treatment agent that generates flammable and harmful gases, such as chlorobenzene, is applied to the surface of a plate-like material such as a photoresist substrate using conventional techniques. It is an object of the present invention to provide a completely sealed surface treatment agent application device that eliminates such drawbacks and prevents the surface treatment agent and its volatile gas from directly coming into contact with or being mixed with the outside air.

(D) Structure In order to achieve the above object, the apparatus according to the present invention includes a sealed substrate holding container for storing and holding a substrate for applying a surface treatment agent, a tank for storing the surface treatment agent, and a tank for storing the surface treatment agent. A gas filter that captures the volatile gas of the surface treatment agent and a compressed gas supply means that supplies compressed gas for transporting the surface treatment agent within the system of the device are connected to the surface treatment agent through a piping system. It forms a closed system against volatile gases,
The device is characterized in that it is configured so that the volatile gas is not discharged outside the system.

(e) Example The following is an example of the present invention, and a second example showing its configuration.
This will be explained based on the diagram. In the same figure, the four-way valve 6
The operation position is between the pipe 5 from the compressed nitrogen gas supply source for surface treatment agent transfer and the internal pressure control pipe 7 of the surface treatment agent storage tank 9, and the exhaust pipe 16.
Although the drawing shows communication between the internal pressure control pipe 15 and the internal pressure control pipe 15 of the substrate holding container,
This four-way valve 6 connects the compressed gas supply pipe 15 to the internal pressure control pipe 15 of the substrate holding container, and also connects the internal pressure control pipe 7 of the surface treatment agent storage tank to the exhaust pipe 16 by rotating it 90 degrees. You can switch to

By the way, in the operating position of the four-way valve 6 shown in FIG.
The surface treatment agent is introduced into the surface treatment agent storage tank 9 through the storage tank internal pressure control piping 7, and the liquid level of the surface treatment agent 8 is pressurized. This pressure causes the surface treatment agent 8 to be fed into the substrate holder 12 through the piping 10 and the on-off valve 11 which is in an open state. At this time, the pressure inside this container is controlled by the substrate holding container internal pressure control piping 15, the four-way valve 6, and the exhaust pipe 1.
6 and is led to a gas filter 14, where volatile gas components from the surface treatment agent are trapped and only nitrogen gas components are released to the outside air. The liquid level of the surface treatment agent introduced into the substrate holding container 12 is displayed on the vertical rising part of the liquid drain pipe 13 (made of a transparent glass tube) which also functions as a liquid level gauge. When the surface treatment agent accumulates to a sufficient height to submerge the substrate 17 to be processed, which has been stored in advance in the substrate holding container 12, the on-off valve 11 is closed to cut off the injection of the surface treatment agent, and the surface treatment of the substrate 17 is completed. Leave it for the required time.

After that, rotate the four-way valve 6 by 90 degrees, and
When the storage tank internal pressure control piping 7 is connected to the substrate holding container internal pressure control piping 15 and the storage tank internal pressure control piping 7 is connected to the exhaust pipe 16, compressed nitrogen gas flows into the substrate holding container 12.
The residual surface treatment agent therein is introduced into the drain pipe 1.
3 and is discharged to the gas filter 14. Gas filter 14 traps the surface treatment agent and its volatile gas, and releases only nitrogen gas to the outside air. Even after discharging the surface treatment agent, continue supplying nitrogen gas until the substrate surface is completely dry. On the other hand, since the conduit 7 communicates with the exhaust pipe 16 via the four-way valve 6, the pressure inside the surface treatment agent storage tank 9 is guided to the gas filter 14 through these passages, and volatile gas components are trapped there. , only the nitrogen gas component is released into the outside air.

(F) Effect As is clear from the above explanation, according to the present invention, the surface treatment agent itself and its volatile gases are handled in a completely closed system, so that no flammable harmful gases are mixed into the outside air. Furthermore, since the processing time for the substrate surface can be controlled freely by simply operating the valve, quality control of surface processing becomes easy.

[Brief explanation of the drawing]

FIG. 1 is a diagram showing a photoresist treatment process using a lift-off method. FIG. 2 is a diagram showing the configuration of an embodiment of the present invention. 5... Compressed gas supply pipe, 6... Four-way valve, 7...
Piping for controlling tank internal pressure, 8...Surface treatment agent, 9...Surface treatment agent storage tank, 10...Conduit, 11...Opening/closing valve, 12...Airtight container, 13...
...Drain pipe, 14...Gas filter, 15...Piping for controlling the internal pressure of the substrate holding container.

Claims (1)

[Scope of utility model registration request] An apparatus for applying a volatile surface treatment agent to a substrate surface, the device comprising: a sealed substrate holding container for storing and holding a substrate for applying the surface treatment agent; and a tank for storing the surface treatment agent; A gas filter that captures the volatile gas of the surface treatment agent and a compressed gas supply means that supplies compressed gas for transporting the surface treatment agent within the system of the device are connected to each other through a piping system to capture the volatile gas of the surface treatment agent. 1. A surface treatment agent application device, characterized in that it forms a closed system for volatile gases, and is configured so that the volatile gases are not discharged outside the system.