JPS62131264A - Apparatus for treating silane coupling agent - Google Patents

Abstract

PURPOSE:To prevent the deterioration of the silane coupling agent due to a reaction of said agent with a moisture contd. in an atmosphere by providing a reducing vessel accommodated the silane coupling agent therein, a reducing vessel accommodated a substrate therein and a pipe connected with said reducing vessels. CONSTITUTION:The titled apparatus comprises the reducing vessel 1 accommodated a beaker 11 put in the silane coupling agent 10 therein and the reducing vessel 2 accommodated the substrate 12. The reducing vessel 1 and 2 are connected by the pipe 3 through a valve 4. Also a pipe 6 connecting the reducing vessels 1 and 2 with a reducing pump 5, the valves 7 and 8, and a leak valve 9 for returning a pressure of the reducing vessel 2 to an atmosphere pressure are provided. The reducing vessels 1 and 2 are reduced a pressure. When the valve 4 is opened, a vapor of the silane coupling agent coming from the reducing vessel 1 flows into the reducing vessel 2, followed by treating the surface of the substrate 12. Thus, the vapor concentration of the silane coupling agent contd. in the vessel 1 can be constant in the beginning of the treatment, thereby treating the substrate with the silane coupling agent which has a good reproducibility.

Description

[Detailed description of the invention] [Industrial application field] The present invention relates to a silane coupling agent processing device, particularly.

The trend toward finer resists that enables stable silane coupling agent treatment has led to the need to strengthen the adhesion between the photoresist and the substrate.

In particular, novolac-based positive photoresists14 are widely used due to their high resolution, but when the substrate surface is glass or an oxide such as silicon dioxide, the adhesion between the photoresist and the substrate surface is strengthened. for,
It is known to coat the surface of glass or the like with a silane coupling agent as a pretreatment. For example, U.S. Patent 3,549.368 (R.H.
d F,T,Diverse”Processfor
Improving Photoresist
It is known to carry out a pretreatment of spin-coding hexaalkyldisilazane such as hexamethyldisilazane before applying a photoresist, as shown in 2003, Adhesion'.

This pretreatment with a silane coupling agent converts the hydrophilic surface of the substrate into p-hydrophobic through coupling, and strengthens the adhesive force by increasing the affinity with hydrophobic resins such as photoresists. be.

[Conventional technology]

Conventional silane coupling agent processing equipment uses a spinner as described above, or a container for dipping the substrate in the silane coupling agent, as shown in Figure 2. A closed container 2 containing a beaker 11 containing a silane coupling agent 10'
An apparatus is used in which the substrate 12 is left standing in a vacuum chamber for a predetermined period of time, and the surface of the substrate 12 is treated with silane coupling agent vapor.

[Problem that the invention seeks to solve]

Among the conventional processing apparatuses described above, processing using silane coupling agent vapor is free from the influence of dust and impurities in the silane coupling agent, and is more advantageous than processing by coating or dipping. However, when processing with steam, the substrate is placed in a sealed container.

Alternatively, since the sealed container is opened when taking out the container, the concentration of silane coupling agent vapor in the sealed container decreases. Not only does the initial concentration of the silane coupling agent vapor vary depending on the opening time during substrate storage or the holding time before storage, but the concentration also changes during processing, making it difficult to control the silane coupling agent processing conditions. There was a drawback.

In addition, silane coupling agents react with moisture in the air,
to degrade. For example, hexamethyldine lazan reacts with moisture in the air to produce ammonia.

Therefore, it is necessary to store and use the silane coupling agent in a moisture-free atmosphere, but conventional equipment also has the disadvantage that it can only be processed in air.

[Means for solving problems]

Is the silane coupling agent treatment device of the present invention a silane coupling agent? A reduced pressure container for accommodating the substrate, a reduced pressure container for accommodating all of the substrates, a pipe connecting the two pressure reduced containers to each other, and an on-off valve provided in the pipe.

and means for reducing the pressure in the two pressure reducing containers.

〔Example〕

Next, embodiments of the present invention will be described in detail with reference to the drawings.

FIG. 1 is a block diagram showing an embodiment of the present invention.

There is a vacuum container 1 containing a beaker 11 containing a silane coupling agent 10e and a vacuum container 2 containing a substrate 12, and these two vacuum containers 1.2 are connected to each other by a pipe 3 having a pulp 4 in the middle. ing. Further, piping 6 connecting the vacuum containers 1 and 2 and the vacuum pump 5 and pulp 7.
8 and a leak valve 9 for returning the pressure reducing container 2 to atmospheric pressure.

Here, the reduced pressure container and the reduced pressure pump do not need to be for ultra-high vacuum use, and only need to have a pressure sufficiently lower than atmospheric pressure. Therefore, a diaphragm type pump, a rotation pump, etc. can be used. These oil-free pumps do not cause organic contamination to the substrate. In the silica/coupling agent treatment using the apparatus shown in FIG. 1, first, the vacuum container 1 and pulp 7 are fully opened and the pressure is reduced to a predetermined pressure. After the pressure is reduced, the valve 7 is closed, and then the pulp 8 of the pressure reduction container 2 is opened to reduce the pressure, and then the valve 8 is closed. Next, when the pulp 4 connecting the vacuum vessels 1 and 2 is opened, silane coupling agent vapor flows from the vacuum vessel 1 into the vacuum vessel 2, and the surface of the substrate 12 is treated. After the predetermined treatment is completed, the pulp 4 is closed and the pulp 8 is opened, and the silane coupling agent vapor is discharged from the vacuum container 2, and the treatment is stopped. Therefore, a zero-order substrate can be easily controlled. To process, the vacuum container 2 is brought to atmospheric pressure by operating the leak pulp 9, and after replacing all the substrates, the vacuum container 1 is brought to a predetermined pressure of 1.
Start the process by reducing the pressure. By reducing the pressure in the vacuum container 1 to the desired pressure, it becomes possible to keep the silane coupling agent vapor concentration in the container IP3 constant after the start of treatment, resulting in highly reproducible silane/coupling agent treatment. I can do it.

Furthermore, by introducing a dry inert gas such as nitrogen gas into the vacuum container 2 from the leak pulp 9 after the silane coupling agent treatment, the substrate treated with the silane coupling agent can be kept clean and stable until the photoresist is applied. It is also possible to store it.

〔Effect of the invention〕

In the silane coupling agent processing apparatus of the present invention, before processing the substrate, the pressure in the vacuum container 1 is reduced to a predetermined pressure, and after the processing, the silane coupling agent vapor in the vacuum container 2 is exhausted to completely complete the processing. By stopping the silane coupling agent treatment, it becomes possible to easily control the silane coupling agent treatment.

Furthermore, the silane coupling agent is stored under reduced pressure to prevent it from reacting with water vapor in the atmosphere and deteriorating during use.

[Brief explanation of drawings]

FIG. 1 is a block diagram showing an embodiment of the present invention, and FIG. 2 is a block diagram showing an example of a conventional processing apparatus. 1...Reduced pressure container, 2...Reduced pressure container, 3
...Piping, 4...Pulp, 5...
...Reduction pump, 6...Reduction piping, 7, 8...
...Pulp, 9...Leak pulp, 10.
... Silane coupling agent, 11 ... Beaker, 12 ... Substrate, 20 ... Airtight container 07. 1,,! Agent: Susumu Enhara, Patent Attorney, Nsuji 2
figure

Claims (1)

[Claims] A first reduced pressure container that accommodates a silane coupling agent, a second reduced pressure container that contains a substrate, piping that connects the first and second reduced pressure containers, and an on-off valve provided in the piping. A silane coupling agent processing apparatus comprising: and a pressure reduction means for reducing the pressure in the first and second pressure reduction containers.