JPH0131408B2 - - Google Patents

Info

Publication number
JPH0131408B2
JPH0131408B2 JP58044468A JP4446883A JPH0131408B2 JP H0131408 B2 JPH0131408 B2 JP H0131408B2 JP 58044468 A JP58044468 A JP 58044468A JP 4446883 A JP4446883 A JP 4446883A JP H0131408 B2 JPH0131408 B2 JP H0131408B2
Authority
JP
Japan
Prior art keywords
resin
solution
photosensitive resin
sheet
photosensitive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP58044468A
Other languages
English (en)
Japanese (ja)
Other versions
JPS59169519A (ja
Inventor
Kyoshi Tamura
Kenji Murayama
Tokuo Fujita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toray Industries Inc
Original Assignee
Toray Industries Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toray Industries Inc filed Critical Toray Industries Inc
Priority to JP58044468A priority Critical patent/JPS59169519A/ja
Publication of JPS59169519A publication Critical patent/JPS59169519A/ja
Publication of JPH0131408B2 publication Critical patent/JPH0131408B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Filtration Of Liquid (AREA)
JP58044468A 1983-03-18 1983-03-18 感光性樹脂溶液の濾過分離法 Granted JPS59169519A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58044468A JPS59169519A (ja) 1983-03-18 1983-03-18 感光性樹脂溶液の濾過分離法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58044468A JPS59169519A (ja) 1983-03-18 1983-03-18 感光性樹脂溶液の濾過分離法

Publications (2)

Publication Number Publication Date
JPS59169519A JPS59169519A (ja) 1984-09-25
JPH0131408B2 true JPH0131408B2 (enrdf_load_stackoverflow) 1989-06-26

Family

ID=12692330

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58044468A Granted JPS59169519A (ja) 1983-03-18 1983-03-18 感光性樹脂溶液の濾過分離法

Country Status (1)

Country Link
JP (1) JPS59169519A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS59169519A (ja) 1984-09-25

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