JPH0131347Y2 - - Google Patents
Info
- Publication number
- JPH0131347Y2 JPH0131347Y2 JP1982149450U JP14945082U JPH0131347Y2 JP H0131347 Y2 JPH0131347 Y2 JP H0131347Y2 JP 1982149450 U JP1982149450 U JP 1982149450U JP 14945082 U JP14945082 U JP 14945082U JP H0131347 Y2 JPH0131347 Y2 JP H0131347Y2
- Authority
- JP
- Japan
- Prior art keywords
- steam
- cleaning
- cleaning liquid
- storage body
- tank
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000004140 cleaning Methods 0.000 claims description 60
- 239000007788 liquid Substances 0.000 claims description 59
- 238000001816 cooling Methods 0.000 claims description 23
- 238000013020 steam cleaning Methods 0.000 claims description 13
- 238000000746 purification Methods 0.000 claims description 4
- 239000007921 spray Substances 0.000 claims description 2
- 238000004804 winding Methods 0.000 claims description 2
- 239000000126 substance Substances 0.000 claims 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 7
- 238000009833 condensation Methods 0.000 description 2
- 230000005494 condensation Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000004891 communication Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
Landscapes
- Cleaning In General (AREA)
- Cleaning By Liquid Or Steam (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14945082U JPS5953890U (ja) | 1982-10-01 | 1982-10-01 | 洗浄装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14945082U JPS5953890U (ja) | 1982-10-01 | 1982-10-01 | 洗浄装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5953890U JPS5953890U (ja) | 1984-04-09 |
JPH0131347Y2 true JPH0131347Y2 (fr) | 1989-09-26 |
Family
ID=30331753
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14945082U Granted JPS5953890U (ja) | 1982-10-01 | 1982-10-01 | 洗浄装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5953890U (fr) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2752801B2 (ja) * | 1991-03-19 | 1998-05-18 | 山口日本電気株式会社 | 半導体集積回路装置の洗浄装置 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5739687B2 (fr) * | 1976-09-09 | 1982-08-23 |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS588378Y2 (ja) * | 1977-05-24 | 1983-02-15 | エヌ・テ−・エヌ東洋ベアリング株式会社 | 物品洗滌装置 |
JPS5739687U (fr) * | 1980-08-14 | 1982-03-03 |
-
1982
- 1982-10-01 JP JP14945082U patent/JPS5953890U/ja active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5739687B2 (fr) * | 1976-09-09 | 1982-08-23 |
Also Published As
Publication number | Publication date |
---|---|
JPS5953890U (ja) | 1984-04-09 |
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