JPH0130422Y2 - - Google Patents

Info

Publication number
JPH0130422Y2
JPH0130422Y2 JP8314784U JP8314784U JPH0130422Y2 JP H0130422 Y2 JPH0130422 Y2 JP H0130422Y2 JP 8314784 U JP8314784 U JP 8314784U JP 8314784 U JP8314784 U JP 8314784U JP H0130422 Y2 JPH0130422 Y2 JP H0130422Y2
Authority
JP
Japan
Prior art keywords
substrate
reversing
shaft
reversing shaft
stopper
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP8314784U
Other languages
English (en)
Japanese (ja)
Other versions
JPS60195829U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8314784U priority Critical patent/JPS60195829U/ja
Publication of JPS60195829U publication Critical patent/JPS60195829U/ja
Application granted granted Critical
Publication of JPH0130422Y2 publication Critical patent/JPH0130422Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Attitude Control For Articles On Conveyors (AREA)
  • Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
  • Registering Or Overturning Sheets (AREA)
JP8314784U 1984-06-04 1984-06-04 基板反転装置 Granted JPS60195829U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8314784U JPS60195829U (ja) 1984-06-04 1984-06-04 基板反転装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8314784U JPS60195829U (ja) 1984-06-04 1984-06-04 基板反転装置

Publications (2)

Publication Number Publication Date
JPS60195829U JPS60195829U (ja) 1985-12-27
JPH0130422Y2 true JPH0130422Y2 (US07122547-20061017-C00273.png) 1989-09-18

Family

ID=30631509

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8314784U Granted JPS60195829U (ja) 1984-06-04 1984-06-04 基板反転装置

Country Status (1)

Country Link
JP (1) JPS60195829U (US07122547-20061017-C00273.png)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH053477Y2 (US07122547-20061017-C00273.png) * 1986-05-08 1993-01-27
JP2521318Y2 (ja) * 1993-12-10 1996-12-25 東京エレクトロン 株式会社 搬送装置

Also Published As

Publication number Publication date
JPS60195829U (ja) 1985-12-27

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