JPH01301137A - 急速真空漏れ探査装置 - Google Patents

急速真空漏れ探査装置

Info

Publication number
JPH01301137A
JPH01301137A JP13024888A JP13024888A JPH01301137A JP H01301137 A JPH01301137 A JP H01301137A JP 13024888 A JP13024888 A JP 13024888A JP 13024888 A JP13024888 A JP 13024888A JP H01301137 A JPH01301137 A JP H01301137A
Authority
JP
Japan
Prior art keywords
pump
piping
valve
vacuum
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13024888A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0519092B2 (OSRAM
Inventor
Yasuyuki Tanaka
保之 田中
Yasuki Masubuchi
増渕　泰樹
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Denso Corp
Ulvac Inc
Original Assignee
Ulvac Inc
NipponDenso Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac Inc, NipponDenso Co Ltd filed Critical Ulvac Inc
Priority to JP13024888A priority Critical patent/JPH01301137A/ja
Publication of JPH01301137A publication Critical patent/JPH01301137A/ja
Publication of JPH0519092B2 publication Critical patent/JPH0519092B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
    • G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
    • G01M3/202—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material using mass spectrometer detection systems

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Examining Or Testing Airtightness (AREA)
JP13024888A 1988-05-30 1988-05-30 急速真空漏れ探査装置 Granted JPH01301137A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13024888A JPH01301137A (ja) 1988-05-30 1988-05-30 急速真空漏れ探査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13024888A JPH01301137A (ja) 1988-05-30 1988-05-30 急速真空漏れ探査装置

Publications (2)

Publication Number Publication Date
JPH01301137A true JPH01301137A (ja) 1989-12-05
JPH0519092B2 JPH0519092B2 (OSRAM) 1993-03-15

Family

ID=15029694

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13024888A Granted JPH01301137A (ja) 1988-05-30 1988-05-30 急速真空漏れ探査装置

Country Status (1)

Country Link
JP (1) JPH01301137A (OSRAM)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4472962A (en) * 1981-08-03 1984-09-25 Balzers Aktiengesellschaft Low pressure leak detector
JPS59152436U (ja) * 1983-03-30 1984-10-12 株式会社島津製作所 リ−クテスト装置
JPS6262947U (OSRAM) * 1985-10-12 1987-04-18

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4472962A (en) * 1981-08-03 1984-09-25 Balzers Aktiengesellschaft Low pressure leak detector
JPS59152436U (ja) * 1983-03-30 1984-10-12 株式会社島津製作所 リ−クテスト装置
JPS6262947U (OSRAM) * 1985-10-12 1987-04-18

Also Published As

Publication number Publication date
JPH0519092B2 (OSRAM) 1993-03-15

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