JPH01301029A - 基板バックアップ装置 - Google Patents

基板バックアップ装置

Info

Publication number
JPH01301029A
JPH01301029A JP1089115A JP8911589A JPH01301029A JP H01301029 A JPH01301029 A JP H01301029A JP 1089115 A JP1089115 A JP 1089115A JP 8911589 A JP8911589 A JP 8911589A JP H01301029 A JPH01301029 A JP H01301029A
Authority
JP
Japan
Prior art keywords
substrate
board
backup
holes
size
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1089115A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0440133B2 (enrdf_load_stackoverflow
Inventor
Masayuki Mobara
正之 茂原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sanyo Electric Co Ltd
Original Assignee
Sanyo Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sanyo Electric Co Ltd filed Critical Sanyo Electric Co Ltd
Priority to JP1089115A priority Critical patent/JPH01301029A/ja
Publication of JPH01301029A publication Critical patent/JPH01301029A/ja
Publication of JPH0440133B2 publication Critical patent/JPH0440133B2/ja
Granted legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/03—Stationary work or tool supports
    • B23Q1/032—Stationary work or tool supports characterised by properties of the support surface

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Supply And Installment Of Electrical Components (AREA)
JP1089115A 1989-04-07 1989-04-07 基板バックアップ装置 Granted JPH01301029A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1089115A JPH01301029A (ja) 1989-04-07 1989-04-07 基板バックアップ装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1089115A JPH01301029A (ja) 1989-04-07 1989-04-07 基板バックアップ装置

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP57139613A Division JPS5929492A (ja) 1982-08-10 1982-08-10 電子部品自動装着装置

Publications (2)

Publication Number Publication Date
JPH01301029A true JPH01301029A (ja) 1989-12-05
JPH0440133B2 JPH0440133B2 (enrdf_load_stackoverflow) 1992-07-01

Family

ID=13961896

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1089115A Granted JPH01301029A (ja) 1989-04-07 1989-04-07 基板バックアップ装置

Country Status (1)

Country Link
JP (1) JPH01301029A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015009169A (ja) * 2013-06-26 2015-01-19 パナソニック株式会社 プラズマ処理装置、および、プラズマ処理方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55179081U (enrdf_load_stackoverflow) * 1979-06-11 1980-12-23
JPS56114600U (enrdf_load_stackoverflow) * 1980-02-05 1981-09-03
JPS57104574U (enrdf_load_stackoverflow) * 1980-12-17 1982-06-28

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55179081U (enrdf_load_stackoverflow) * 1979-06-11 1980-12-23
JPS56114600U (enrdf_load_stackoverflow) * 1980-02-05 1981-09-03
JPS57104574U (enrdf_load_stackoverflow) * 1980-12-17 1982-06-28

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015009169A (ja) * 2013-06-26 2015-01-19 パナソニック株式会社 プラズマ処理装置、および、プラズマ処理方法

Also Published As

Publication number Publication date
JPH0440133B2 (enrdf_load_stackoverflow) 1992-07-01

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