JPH0129400B2 - - Google Patents
Info
- Publication number
- JPH0129400B2 JPH0129400B2 JP24222484A JP24222484A JPH0129400B2 JP H0129400 B2 JPH0129400 B2 JP H0129400B2 JP 24222484 A JP24222484 A JP 24222484A JP 24222484 A JP24222484 A JP 24222484A JP H0129400 B2 JPH0129400 B2 JP H0129400B2
- Authority
- JP
- Japan
- Prior art keywords
- film
- boron
- solid lubricant
- atomic beam
- molybdenum sulfide
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Lubricants (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24222484A JPS61120897A (ja) | 1984-11-19 | 1984-11-19 | 固体潤滑膜および作製方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24222484A JPS61120897A (ja) | 1984-11-19 | 1984-11-19 | 固体潤滑膜および作製方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61120897A JPS61120897A (ja) | 1986-06-07 |
| JPH0129400B2 true JPH0129400B2 (OSRAM) | 1989-06-09 |
Family
ID=17086076
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP24222484A Granted JPS61120897A (ja) | 1984-11-19 | 1984-11-19 | 固体潤滑膜および作製方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61120897A (OSRAM) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63195259A (ja) * | 1987-02-06 | 1988-08-12 | Sumitomo Electric Ind Ltd | 二硫化モリブデン薄膜の形成方法 |
| JPH01119683A (ja) * | 1987-10-30 | 1989-05-11 | Nissan Motor Co Ltd | 固体潤滑被膜処理方法 |
| JP2778265B2 (ja) * | 1991-02-21 | 1998-07-23 | 日産自動車株式会社 | 真空用潤滑部材 |
| CN111876732B (zh) * | 2020-06-17 | 2023-06-06 | 西安交通大学 | 一种硼氮化钼/硫化钼纳米复合涂层及其制备方法 |
-
1984
- 1984-11-19 JP JP24222484A patent/JPS61120897A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61120897A (ja) | 1986-06-07 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US4315960A (en) | Method of making a thin film | |
| US4834856A (en) | Method and apparatus for sputtering a superconductor onto a substrate | |
| US5268216A (en) | Multilayer solid lubricant composite structures and method of making same | |
| Habazaki et al. | The sulphidation and oxidation behaviour of sputter-deposited amorphous Al Mo alloys at high temperatures | |
| RU2392351C2 (ru) | Способ нанесения антифрикционного износостойкого покрытия на изделие из металла или сплава | |
| EP1926839A2 (en) | Sputtering target with bonding layer of varying thickness under target material | |
| US5370778A (en) | Method for preparing basal oriented molybdenum disulfide (MoS2) thin films | |
| JPH0323510B2 (OSRAM) | ||
| JPS61120897A (ja) | 固体潤滑膜および作製方法 | |
| KR20010080244A (ko) | 슬라이딩 부재 및 그의 제조방법 | |
| CA2000171C (en) | Preparation method of amorphous superlattice alloys | |
| US20210016417A1 (en) | Cmp pad conditioner and method for manufacturing the same | |
| Riviere et al. | Crystalline TiB2 coatings prepared by ion-beam-assisted deposition | |
| KR100762198B1 (ko) | 고경도,고윤활성 피복재 및 그 피복방법 | |
| EP0352308B1 (en) | Method of sputtering | |
| JPS5944386B2 (ja) | 耐熱性金属薄膜の製造方法 | |
| KR102877458B1 (ko) | 다중 타겟을 이용한 코팅 방법 및 그에 따른 코팅재 | |
| JPS61201772A (ja) | 薄膜形成方法および装置 | |
| JP2518424B2 (ja) | 磁気ヘッドおよびその製造方法 | |
| Giagkas et al. | Preparation and tribologic properties of Ti and Zr nitride multilayer coatings | |
| JPH1121663A (ja) | 耐摩耗性部材およびその製造方法 | |
| JPH06306581A (ja) | 摺動面用被膜及びその形成方法 | |
| JPS60197933A (ja) | 磁気デイスク | |
| JPS61221360A (ja) | 硬質表面フレクシブルフイルム及びその製造方法 | |
| US6051115A (en) | Adhesive strength increasing method for metal thin film |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |