JPS61120897A - 固体潤滑膜および作製方法 - Google Patents

固体潤滑膜および作製方法

Info

Publication number
JPS61120897A
JPS61120897A JP24222484A JP24222484A JPS61120897A JP S61120897 A JPS61120897 A JP S61120897A JP 24222484 A JP24222484 A JP 24222484A JP 24222484 A JP24222484 A JP 24222484A JP S61120897 A JPS61120897 A JP S61120897A
Authority
JP
Japan
Prior art keywords
film
boron
solid lubricant
atomic beam
sputter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP24222484A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0129400B2 (OSRAM
Inventor
Hiroki Kuwano
博喜 桑野
Fusao Shimokawa
房男 下川
Kazutoshi Nagai
一敏 長井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NTT Inc
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP24222484A priority Critical patent/JPS61120897A/ja
Publication of JPS61120897A publication Critical patent/JPS61120897A/ja
Publication of JPH0129400B2 publication Critical patent/JPH0129400B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Lubricants (AREA)
  • Physical Vapour Deposition (AREA)
JP24222484A 1984-11-19 1984-11-19 固体潤滑膜および作製方法 Granted JPS61120897A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP24222484A JPS61120897A (ja) 1984-11-19 1984-11-19 固体潤滑膜および作製方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP24222484A JPS61120897A (ja) 1984-11-19 1984-11-19 固体潤滑膜および作製方法

Publications (2)

Publication Number Publication Date
JPS61120897A true JPS61120897A (ja) 1986-06-07
JPH0129400B2 JPH0129400B2 (OSRAM) 1989-06-09

Family

ID=17086076

Family Applications (1)

Application Number Title Priority Date Filing Date
JP24222484A Granted JPS61120897A (ja) 1984-11-19 1984-11-19 固体潤滑膜および作製方法

Country Status (1)

Country Link
JP (1) JPS61120897A (OSRAM)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63195259A (ja) * 1987-02-06 1988-08-12 Sumitomo Electric Ind Ltd 二硫化モリブデン薄膜の形成方法
JPH01119683A (ja) * 1987-10-30 1989-05-11 Nissan Motor Co Ltd 固体潤滑被膜処理方法
JPH04266994A (ja) * 1991-02-21 1992-09-22 Nissan Motor Co Ltd 真空用潤滑部材
CN111876732A (zh) * 2020-06-17 2020-11-03 西安交通大学 一种硼氮化钼/硫化钼纳米复合涂层及其制备方法

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63195259A (ja) * 1987-02-06 1988-08-12 Sumitomo Electric Ind Ltd 二硫化モリブデン薄膜の形成方法
JPH01119683A (ja) * 1987-10-30 1989-05-11 Nissan Motor Co Ltd 固体潤滑被膜処理方法
JPH04266994A (ja) * 1991-02-21 1992-09-22 Nissan Motor Co Ltd 真空用潤滑部材
CN111876732A (zh) * 2020-06-17 2020-11-03 西安交通大学 一种硼氮化钼/硫化钼纳米复合涂层及其制备方法
CN111876732B (zh) * 2020-06-17 2023-06-06 西安交通大学 一种硼氮化钼/硫化钼纳米复合涂层及其制备方法

Also Published As

Publication number Publication date
JPH0129400B2 (OSRAM) 1989-06-09

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term