JPH01270396A - 多層配線基板 - Google Patents
多層配線基板Info
- Publication number
- JPH01270396A JPH01270396A JP9972588A JP9972588A JPH01270396A JP H01270396 A JPH01270396 A JP H01270396A JP 9972588 A JP9972588 A JP 9972588A JP 9972588 A JP9972588 A JP 9972588A JP H01270396 A JPH01270396 A JP H01270396A
- Authority
- JP
- Japan
- Prior art keywords
- resin
- inner layer
- layer material
- base material
- upside
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000463 material Substances 0.000 claims abstract description 52
- 239000011347 resin Substances 0.000 claims abstract description 28
- 229920005989 resin Polymers 0.000 claims abstract description 28
- 238000005553 drilling Methods 0.000 claims description 9
- 230000010354 integration Effects 0.000 claims description 3
- 239000011521 glass Substances 0.000 abstract description 9
- 238000000034 method Methods 0.000 abstract description 9
- 239000004744 fabric Substances 0.000 abstract description 8
- 238000007747 plating Methods 0.000 abstract description 8
- 238000005260 corrosion Methods 0.000 abstract description 6
- 230000007797 corrosion Effects 0.000 abstract description 6
- 230000035515 penetration Effects 0.000 abstract description 6
- 229910052751 metal Inorganic materials 0.000 abstract description 5
- 239000002184 metal Substances 0.000 abstract description 5
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 abstract description 4
- 239000002253 acid Substances 0.000 abstract description 4
- 239000003822 epoxy resin Substances 0.000 abstract description 4
- 239000011888 foil Substances 0.000 abstract description 4
- 229920000647 polyepoxide Polymers 0.000 abstract description 4
- 229910052802 copper Inorganic materials 0.000 abstract description 3
- 239000010949 copper Substances 0.000 abstract description 3
- 238000000926 separation method Methods 0.000 abstract 1
- 238000010438 heat treatment Methods 0.000 description 5
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 4
- 239000007788 liquid Substances 0.000 description 4
- 238000011417 postcuring Methods 0.000 description 4
- 238000005336 cracking Methods 0.000 description 3
- 230000003628 erosive effect Effects 0.000 description 3
- 238000000465 moulding Methods 0.000 description 3
- 229920001721 polyimide Polymers 0.000 description 2
- 239000009719 polyimide resin Substances 0.000 description 2
- 238000003825 pressing Methods 0.000 description 2
- 239000004593 Epoxy Substances 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 239000011889 copper foil Substances 0.000 description 1
- 238000004132 cross linking Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- QGBSISYHAICWAH-UHFFFAOYSA-N dicyandiamide Chemical compound NC(N)=NC#N QGBSISYHAICWAH-UHFFFAOYSA-N 0.000 description 1
- XXBDWLFCJWSEKW-UHFFFAOYSA-N dimethylbenzylamine Chemical compound CN(C)CC1=CC=CC=C1 XXBDWLFCJWSEKW-UHFFFAOYSA-N 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000009472 formulation Methods 0.000 description 1
- 238000003475 lamination Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 239000007800 oxidant agent Substances 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 239000005011 phenolic resin Substances 0.000 description 1
- 229920006122 polyamide resin Polymers 0.000 description 1
- 229920001225 polyester resin Polymers 0.000 description 1
- 239000004645 polyester resin Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 229920006337 unsaturated polyester resin Polymers 0.000 description 1
Landscapes
- Production Of Multi-Layered Print Wiring Board (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9972588A JPH01270396A (ja) | 1988-04-22 | 1988-04-22 | 多層配線基板 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9972588A JPH01270396A (ja) | 1988-04-22 | 1988-04-22 | 多層配線基板 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH01270396A true JPH01270396A (ja) | 1989-10-27 |
JPH0557754B2 JPH0557754B2 (enrdf_load_stackoverflow) | 1993-08-24 |
Family
ID=14255048
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9972588A Granted JPH01270396A (ja) | 1988-04-22 | 1988-04-22 | 多層配線基板 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH01270396A (enrdf_load_stackoverflow) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01318288A (ja) * | 1988-06-20 | 1989-12-22 | Matsushita Electric Works Ltd | 多層配線基板 |
JP2010034142A (ja) * | 2008-07-25 | 2010-02-12 | Sumitomo Bakelite Co Ltd | 多層配線板の製造方法、多層配線板および半導体装置 |
-
1988
- 1988-04-22 JP JP9972588A patent/JPH01270396A/ja active Granted
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01318288A (ja) * | 1988-06-20 | 1989-12-22 | Matsushita Electric Works Ltd | 多層配線基板 |
JP2010034142A (ja) * | 2008-07-25 | 2010-02-12 | Sumitomo Bakelite Co Ltd | 多層配線板の製造方法、多層配線板および半導体装置 |
Also Published As
Publication number | Publication date |
---|---|
JPH0557754B2 (enrdf_load_stackoverflow) | 1993-08-24 |
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