JPH0126176B2 - - Google Patents

Info

Publication number
JPH0126176B2
JPH0126176B2 JP58097965A JP9796583A JPH0126176B2 JP H0126176 B2 JPH0126176 B2 JP H0126176B2 JP 58097965 A JP58097965 A JP 58097965A JP 9796583 A JP9796583 A JP 9796583A JP H0126176 B2 JPH0126176 B2 JP H0126176B2
Authority
JP
Japan
Prior art keywords
insulating film
conductive material
sputtering method
wiring
frequency bias
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP58097965A
Other languages
English (en)
Japanese (ja)
Other versions
JPS59224144A (ja
Inventor
Mitsutaka Morimoto
Tooru Mogami
Eiji Nagasawa
Hidekazu Okabayashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP9796583A priority Critical patent/JPS59224144A/ja
Publication of JPS59224144A publication Critical patent/JPS59224144A/ja
Publication of JPH0126176B2 publication Critical patent/JPH0126176B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP9796583A 1983-06-03 1983-06-03 半導体装置の製造方法 Granted JPS59224144A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9796583A JPS59224144A (ja) 1983-06-03 1983-06-03 半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9796583A JPS59224144A (ja) 1983-06-03 1983-06-03 半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JPS59224144A JPS59224144A (ja) 1984-12-17
JPH0126176B2 true JPH0126176B2 (enExample) 1989-05-22

Family

ID=14206378

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9796583A Granted JPS59224144A (ja) 1983-06-03 1983-06-03 半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JPS59224144A (enExample)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5513915A (en) * 1978-07-17 1980-01-31 Chiyou Lsi Gijutsu Kenkyu Kumiai Semiconductor integrated circuit

Also Published As

Publication number Publication date
JPS59224144A (ja) 1984-12-17

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