JPS5513915A - Semiconductor integrated circuit - Google Patents
Semiconductor integrated circuitInfo
- Publication number
- JPS5513915A JPS5513915A JP8618178A JP8618178A JPS5513915A JP S5513915 A JPS5513915 A JP S5513915A JP 8618178 A JP8618178 A JP 8618178A JP 8618178 A JP8618178 A JP 8618178A JP S5513915 A JPS5513915 A JP S5513915A
- Authority
- JP
- Japan
- Prior art keywords
- wiring
- face
- stepped
- convex portion
- width
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To reduce a wiring area by conncting on the intermediate slope a wiring on the convex portion to a wiring on the bottom portion, which are provided on a silicon substrate as to make a contact with each other in the vertical side face.
CONSTITUTION: A slot 22 with the width w" and length w' is provided in the silicon substrate 21 and is covered with an oxide film 24 having the thickness a. In this case, the slot width w=w"-2a. When Al 26 and 25 with the thickness of a<h are vapor-attached, the stepped division is performed from the vertical side face 27, and the area consisting of n pieces of wirings, with the width w can be materialized with a minimun area S=nwL. Connecting of two stepped wirings can be materialized by making a window 34 at the top end of the convex portion 32 after covering it with SiO233. Joining between the surfaces 35 of the slot bottom 40 and convex portion 32 can be achieved with the slope face 37 of a pentagon having an angle of 55°, used as one face of a quadrangular pyramid. Under such a condition, when the full face is covered with SiO2 and Al vapor-attachment is performed, the stepped wiring 26 and 25 can be connected preferably.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8618178A JPS5513915A (en) | 1978-07-17 | 1978-07-17 | Semiconductor integrated circuit |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8618178A JPS5513915A (en) | 1978-07-17 | 1978-07-17 | Semiconductor integrated circuit |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5513915A true JPS5513915A (en) | 1980-01-31 |
Family
ID=13879584
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8618178A Pending JPS5513915A (en) | 1978-07-17 | 1978-07-17 | Semiconductor integrated circuit |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5513915A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59224144A (en) * | 1983-06-03 | 1984-12-17 | Agency Of Ind Science & Technol | Semiconductor device and manufacture thereof |
-
1978
- 1978-07-17 JP JP8618178A patent/JPS5513915A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59224144A (en) * | 1983-06-03 | 1984-12-17 | Agency Of Ind Science & Technol | Semiconductor device and manufacture thereof |
JPH0126176B2 (en) * | 1983-06-03 | 1989-05-22 | Kogyo Gijutsuin |
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