JPH0125412B2 - - Google Patents

Info

Publication number
JPH0125412B2
JPH0125412B2 JP55047413A JP4741380A JPH0125412B2 JP H0125412 B2 JPH0125412 B2 JP H0125412B2 JP 55047413 A JP55047413 A JP 55047413A JP 4741380 A JP4741380 A JP 4741380A JP H0125412 B2 JPH0125412 B2 JP H0125412B2
Authority
JP
Japan
Prior art keywords
helium
workpiece
chamber
leak
sealed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP55047413A
Other languages
English (en)
Japanese (ja)
Other versions
JPS56143940A (en
Inventor
Hiroshi Takamya
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP4741380A priority Critical patent/JPS56143940A/ja
Publication of JPS56143940A publication Critical patent/JPS56143940A/ja
Publication of JPH0125412B2 publication Critical patent/JPH0125412B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
    • G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
    • G01M3/202—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material using mass spectrometer detection systems

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Examining Or Testing Airtightness (AREA)
JP4741380A 1980-04-09 1980-04-09 Leakage inspecting system Granted JPS56143940A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4741380A JPS56143940A (en) 1980-04-09 1980-04-09 Leakage inspecting system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4741380A JPS56143940A (en) 1980-04-09 1980-04-09 Leakage inspecting system

Publications (2)

Publication Number Publication Date
JPS56143940A JPS56143940A (en) 1981-11-10
JPH0125412B2 true JPH0125412B2 (enrdf_load_stackoverflow) 1989-05-17

Family

ID=12774447

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4741380A Granted JPS56143940A (en) 1980-04-09 1980-04-09 Leakage inspecting system

Country Status (1)

Country Link
JP (1) JPS56143940A (enrdf_load_stackoverflow)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58147628A (ja) * 1982-02-26 1983-09-02 Toshiba Corp 冷却ユニツトのガスリ−ク検査装置
JPS58141842U (ja) * 1982-03-19 1983-09-24 トキコ株式会社 洩れ検査装置
JP2003083837A (ja) * 2001-09-11 2003-03-19 Toyota Motor Corp 漏洩試験方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AU504225B2 (en) * 1975-10-17 1979-10-04 Titanium Technology (Aust.) Ltd. Oxidation of titaniferous ores
JPS541685A (en) * 1977-06-06 1979-01-08 Ulvac Corp Leak testing apparatus
JPS5450390A (en) * 1977-09-28 1979-04-20 Toshiba Corp Gas leak testing method

Also Published As

Publication number Publication date
JPS56143940A (en) 1981-11-10

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