JPH0122113Y2 - - Google Patents
Info
- Publication number
- JPH0122113Y2 JPH0122113Y2 JP8138380U JP8138380U JPH0122113Y2 JP H0122113 Y2 JPH0122113 Y2 JP H0122113Y2 JP 8138380 U JP8138380 U JP 8138380U JP 8138380 U JP8138380 U JP 8138380U JP H0122113 Y2 JPH0122113 Y2 JP H0122113Y2
- Authority
- JP
- Japan
- Prior art keywords
- helium
- workpiece
- valve
- chamber
- sealed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000012360 testing method Methods 0.000 claims description 35
- 239000001307 helium Substances 0.000 claims description 33
- 229910052734 helium Inorganic materials 0.000 claims description 33
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 claims description 33
- 238000012856 packing Methods 0.000 claims description 12
- 238000007689 inspection Methods 0.000 claims description 9
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 7
- 229910001873 dinitrogen Inorganic materials 0.000 claims description 3
- 238000003825 pressing Methods 0.000 claims description 2
- 230000002093 peripheral effect Effects 0.000 claims 4
- 238000010586 diagram Methods 0.000 description 9
- 239000007789 gas Substances 0.000 description 8
- 230000012010 growth Effects 0.000 description 6
- 230000034655 secondary growth Effects 0.000 description 6
- 238000000034 method Methods 0.000 description 5
- 230000007547 defect Effects 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 238000011084 recovery Methods 0.000 description 2
- 238000004378 air conditioning Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000010924 continuous production Methods 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000005057 refrigeration Methods 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 238000010998 test method Methods 0.000 description 1
Landscapes
- Examining Or Testing Airtightness (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8138380U JPH0122113Y2 (enrdf_load_stackoverflow) | 1980-06-10 | 1980-06-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8138380U JPH0122113Y2 (enrdf_load_stackoverflow) | 1980-06-10 | 1980-06-10 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS574735U JPS574735U (enrdf_load_stackoverflow) | 1982-01-11 |
| JPH0122113Y2 true JPH0122113Y2 (enrdf_load_stackoverflow) | 1989-06-29 |
Family
ID=29443784
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8138380U Expired JPH0122113Y2 (enrdf_load_stackoverflow) | 1980-06-10 | 1980-06-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0122113Y2 (enrdf_load_stackoverflow) |
-
1980
- 1980-06-10 JP JP8138380U patent/JPH0122113Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS574735U (enrdf_load_stackoverflow) | 1982-01-11 |
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