JPH01253944A - 半導体装置用部品 - Google Patents

半導体装置用部品

Info

Publication number
JPH01253944A
JPH01253944A JP63081239A JP8123988A JPH01253944A JP H01253944 A JPH01253944 A JP H01253944A JP 63081239 A JP63081239 A JP 63081239A JP 8123988 A JP8123988 A JP 8123988A JP H01253944 A JPH01253944 A JP H01253944A
Authority
JP
Japan
Prior art keywords
metal
cap
aln
alloy
soft
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP63081239A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0581184B2 (enExample
Inventor
Akira Sasame
笹目　彰
Hitoshi Sakagami
坂上　仁之
Masaya Miyake
雅也 三宅
Akira Yamakawa
晃 山川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Electric Industries Ltd
Original Assignee
Sumitomo Electric Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Electric Industries Ltd filed Critical Sumitomo Electric Industries Ltd
Priority to JP63081239A priority Critical patent/JPH01253944A/ja
Publication of JPH01253944A publication Critical patent/JPH01253944A/ja
Publication of JPH0581184B2 publication Critical patent/JPH0581184B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10W72/00—

Landscapes

  • Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
JP63081239A 1988-04-04 1988-04-04 半導体装置用部品 Granted JPH01253944A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP63081239A JPH01253944A (ja) 1988-04-04 1988-04-04 半導体装置用部品

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP63081239A JPH01253944A (ja) 1988-04-04 1988-04-04 半導体装置用部品

Publications (2)

Publication Number Publication Date
JPH01253944A true JPH01253944A (ja) 1989-10-11
JPH0581184B2 JPH0581184B2 (enExample) 1993-11-11

Family

ID=13740879

Family Applications (1)

Application Number Title Priority Date Filing Date
JP63081239A Granted JPH01253944A (ja) 1988-04-04 1988-04-04 半導体装置用部品

Country Status (1)

Country Link
JP (1) JPH01253944A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01176939U (enExample) * 1988-06-01 1989-12-18
JPH0361345U (enExample) * 1989-10-19 1991-06-17

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01176939U (enExample) * 1988-06-01 1989-12-18
JPH0361345U (enExample) * 1989-10-19 1991-06-17

Also Published As

Publication number Publication date
JPH0581184B2 (enExample) 1993-11-11

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