JPH0125317Y2 - - Google Patents
Info
- Publication number
- JPH0125317Y2 JPH0125317Y2 JP4675182U JP4675182U JPH0125317Y2 JP H0125317 Y2 JPH0125317 Y2 JP H0125317Y2 JP 4675182 U JP4675182 U JP 4675182U JP 4675182 U JP4675182 U JP 4675182U JP H0125317 Y2 JPH0125317 Y2 JP H0125317Y2
- Authority
- JP
- Japan
- Prior art keywords
- sample
- electrons
- capsule
- electron
- emitted
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000002775 capsule Substances 0.000 claims description 27
- 238000010894 electron beam technology Methods 0.000 claims description 11
- 239000010409 thin film Substances 0.000 claims description 9
- 230000001678 irradiating effect Effects 0.000 claims description 2
- 239000010410 layer Substances 0.000 description 11
- 238000001514 detection method Methods 0.000 description 8
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 7
- 239000007787 solid Substances 0.000 description 5
- 238000010521 absorption reaction Methods 0.000 description 3
- 238000004458 analytical method Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 239000006096 absorbing agent Substances 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 239000011247 coating layer Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000013307 optical fiber Substances 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 238000005211 surface analysis Methods 0.000 description 1
Landscapes
- Analysing Materials By The Use Of Radiation (AREA)
- Sampling And Sample Adjustment (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4675182U JPS58148654U (ja) | 1982-03-30 | 1982-03-30 | 電子的分析装置用試料カプセル |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4675182U JPS58148654U (ja) | 1982-03-30 | 1982-03-30 | 電子的分析装置用試料カプセル |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58148654U JPS58148654U (ja) | 1983-10-05 |
| JPH0125317Y2 true JPH0125317Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1989-07-28 |
Family
ID=30057737
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4675182U Granted JPS58148654U (ja) | 1982-03-30 | 1982-03-30 | 電子的分析装置用試料カプセル |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58148654U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6040012B2 (ja) * | 2012-11-26 | 2016-12-07 | 株式会社日立ハイテクノロジーズ | 試料台及び荷電粒子線装置及び試料観察方法 |
| JP6239246B2 (ja) | 2013-03-13 | 2017-11-29 | 株式会社日立ハイテクノロジーズ | 荷電粒子線装置、試料観察方法、試料台、観察システム、および発光部材 |
| JP6169506B2 (ja) * | 2014-02-19 | 2017-07-26 | 株式会社日立ハイテクノロジーズ | 試料ホルダ、観察システム、および画像生成方法 |
| JP6330074B2 (ja) * | 2017-03-21 | 2018-05-23 | 株式会社日立ハイテクノロジーズ | 荷電粒子線装置、試料観察方法、試料台、観察システム、および発光部材 |
-
1982
- 1982-03-30 JP JP4675182U patent/JPS58148654U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS58148654U (ja) | 1983-10-05 |