JPH0124727B2 - - Google Patents
Info
- Publication number
- JPH0124727B2 JPH0124727B2 JP59095298A JP9529884A JPH0124727B2 JP H0124727 B2 JPH0124727 B2 JP H0124727B2 JP 59095298 A JP59095298 A JP 59095298A JP 9529884 A JP9529884 A JP 9529884A JP H0124727 B2 JPH0124727 B2 JP H0124727B2
- Authority
- JP
- Japan
- Prior art keywords
- gas
- plasma
- sic
- powder
- pressure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
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- Carbon And Carbon Compounds (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59095298A JPS60239316A (ja) | 1984-05-11 | 1984-05-11 | ＳｉＣ超微粉末の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59095298A JPS60239316A (ja) | 1984-05-11 | 1984-05-11 | ＳｉＣ超微粉末の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60239316A JPS60239316A (ja) | 1985-11-28 |
| JPH0124727B2 true JPH0124727B2 (enrdf_load_stackoverflow) | 1989-05-12 |
Family
ID=14133863
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59095298A Granted JPS60239316A (ja) | 1984-05-11 | 1984-05-11 | ＳｉＣ超微粉末の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60239316A (enrdf_load_stackoverflow) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2545716B2 (ja) * | 1989-03-04 | 1996-10-23 | 工業技術院長 | ＦｅーＳｉーＣ系超微粒子の製造法 |
| US4971834A (en) * | 1989-06-29 | 1990-11-20 | Therm Incorporated | Process for preparing precursor for silicon carbide whiskers |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5825045B2 (ja) * | 1979-08-20 | 1983-05-25 | 日本電信電話株式会社 | ＳｉＣ超微粒子の製造方法 |
| JPS5941772B2 (ja) * | 1979-10-19 | 1984-10-09 | 株式会社日立製作所 | 超微粉合成炉 |
| JPS57183369A (en) * | 1981-05-08 | 1982-11-11 | Sumitomo Electric Industries | Manufacture of non-oxide ceramics |
-
1984
- 1984-05-11 JP JP59095298A patent/JPS60239316A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60239316A (ja) | 1985-11-28 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |