JPH01161325U - - Google Patents

Info

Publication number
JPH01161325U
JPH01161325U JP5816188U JP5816188U JPH01161325U JP H01161325 U JPH01161325 U JP H01161325U JP 5816188 U JP5816188 U JP 5816188U JP 5816188 U JP5816188 U JP 5816188U JP H01161325 U JPH01161325 U JP H01161325U
Authority
JP
Japan
Prior art keywords
exposed
chuck
view
exposure apparatus
suction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5816188U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0517874Y2 (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5816188U priority Critical patent/JPH0517874Y2/ja
Publication of JPH01161325U publication Critical patent/JPH01161325U/ja
Application granted granted Critical
Publication of JPH0517874Y2 publication Critical patent/JPH0517874Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP5816188U 1988-04-28 1988-04-28 Expired - Lifetime JPH0517874Y2 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5816188U JPH0517874Y2 (enExample) 1988-04-28 1988-04-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5816188U JPH0517874Y2 (enExample) 1988-04-28 1988-04-28

Publications (2)

Publication Number Publication Date
JPH01161325U true JPH01161325U (enExample) 1989-11-09
JPH0517874Y2 JPH0517874Y2 (enExample) 1993-05-13

Family

ID=31283986

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5816188U Expired - Lifetime JPH0517874Y2 (enExample) 1988-04-28 1988-04-28

Country Status (1)

Country Link
JP (1) JPH0517874Y2 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006173316A (ja) * 2004-12-15 2006-06-29 Jeol Ltd 移動ブロック支持機構及びステージ装置並びに荷電粒子ビーム装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006173316A (ja) * 2004-12-15 2006-06-29 Jeol Ltd 移動ブロック支持機構及びステージ装置並びに荷電粒子ビーム装置

Also Published As

Publication number Publication date
JPH0517874Y2 (enExample) 1993-05-13

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