JPS6454335U - - Google Patents
Info
- Publication number
- JPS6454335U JPS6454335U JP14958387U JP14958387U JPS6454335U JP S6454335 U JPS6454335 U JP S6454335U JP 14958387 U JP14958387 U JP 14958387U JP 14958387 U JP14958387 U JP 14958387U JP S6454335 U JPS6454335 U JP S6454335U
- Authority
- JP
- Japan
- Prior art keywords
- exposed
- suction
- view
- chuck
- exposure apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010586 diagram Methods 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
Landscapes
- Details Of Measuring And Other Instruments (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14958387U JPH0543469Y2 (enExample) | 1987-09-30 | 1987-09-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14958387U JPH0543469Y2 (enExample) | 1987-09-30 | 1987-09-30 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6454335U true JPS6454335U (enExample) | 1989-04-04 |
| JPH0543469Y2 JPH0543469Y2 (enExample) | 1993-11-02 |
Family
ID=31421943
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14958387U Expired - Lifetime JPH0543469Y2 (enExample) | 1987-09-30 | 1987-09-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0543469Y2 (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010110870A (ja) * | 2008-11-07 | 2010-05-20 | Sumitomo Heavy Ind Ltd | ステージ装置及びプローバ装置 |
-
1987
- 1987-09-30 JP JP14958387U patent/JPH0543469Y2/ja not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010110870A (ja) * | 2008-11-07 | 2010-05-20 | Sumitomo Heavy Ind Ltd | ステージ装置及びプローバ装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0543469Y2 (enExample) | 1993-11-02 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPS6454335U (enExample) | ||
| JPH01161325U (enExample) | ||
| JPH0728159B2 (ja) | プリント基板のバックアップ装置 | |
| JPS6437044U (enExample) | ||
| CN218837447U (zh) | 一种用于陶瓷基板贴片的真空吸块 | |
| JPH0964074A (ja) | ダイ突き上げ装置 | |
| JP2577855Y2 (ja) | チャック装置 | |
| JPS6094487U (ja) | ウエハ吸着装置 | |
| JPH02717U (enExample) | ||
| JPH05208389A (ja) | 板状体の吸着保持装置 | |
| JPH045646U (enExample) | ||
| JP2025183538A (ja) | 非接触吸着盤 | |
| JPH0357436Y2 (enExample) | ||
| JPH03155200A (ja) | 基板保持装置 | |
| JPH045699U (enExample) | ||
| JPH063938U (ja) | ウェーハ保持具 | |
| JPH074125Y2 (ja) | 真空チャック | |
| WO2025253938A1 (ja) | 非接触吸着盤 | |
| JPH0442394U (enExample) | ||
| JPS6236537U (enExample) | ||
| JPS58118747U (ja) | 基板支持具 | |
| JPH04112536A (ja) | メタルマスク位置合わせ装置 | |
| JPH06312335A (ja) | ワーク挿入装置 | |
| JPH02110333U (enExample) | ||
| JPH03241898A (ja) | 電子部品の位置決め吸着ユニット |