JPH01153632U - - Google Patents

Info

Publication number
JPH01153632U
JPH01153632U JP4493888U JP4493888U JPH01153632U JP H01153632 U JPH01153632 U JP H01153632U JP 4493888 U JP4493888 U JP 4493888U JP 4493888 U JP4493888 U JP 4493888U JP H01153632 U JPH01153632 U JP H01153632U
Authority
JP
Japan
Prior art keywords
wafer
quartz
stand
treatment apparatus
heat treatment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4493888U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4493888U priority Critical patent/JPH01153632U/ja
Publication of JPH01153632U publication Critical patent/JPH01153632U/ja
Pending legal-status Critical Current

Links

JP4493888U 1988-04-01 1988-04-01 Pending JPH01153632U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4493888U JPH01153632U (enrdf_load_stackoverflow) 1988-04-01 1988-04-01

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4493888U JPH01153632U (enrdf_load_stackoverflow) 1988-04-01 1988-04-01

Publications (1)

Publication Number Publication Date
JPH01153632U true JPH01153632U (enrdf_load_stackoverflow) 1989-10-23

Family

ID=31271271

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4493888U Pending JPH01153632U (enrdf_load_stackoverflow) 1988-04-01 1988-04-01

Country Status (1)

Country Link
JP (1) JPH01153632U (enrdf_load_stackoverflow)

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