JPS6315040U - - Google Patents

Info

Publication number
JPS6315040U
JPS6315040U JP10883486U JP10883486U JPS6315040U JP S6315040 U JPS6315040 U JP S6315040U JP 10883486 U JP10883486 U JP 10883486U JP 10883486 U JP10883486 U JP 10883486U JP S6315040 U JPS6315040 U JP S6315040U
Authority
JP
Japan
Prior art keywords
wafer
reaction tube
insertion port
boat
temperature section
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10883486U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10883486U priority Critical patent/JPS6315040U/ja
Publication of JPS6315040U publication Critical patent/JPS6315040U/ja
Pending legal-status Critical Current

Links

JP10883486U 1986-07-16 1986-07-16 Pending JPS6315040U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10883486U JPS6315040U (enrdf_load_stackoverflow) 1986-07-16 1986-07-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10883486U JPS6315040U (enrdf_load_stackoverflow) 1986-07-16 1986-07-16

Publications (1)

Publication Number Publication Date
JPS6315040U true JPS6315040U (enrdf_load_stackoverflow) 1988-02-01

Family

ID=30986391

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10883486U Pending JPS6315040U (enrdf_load_stackoverflow) 1986-07-16 1986-07-16

Country Status (1)

Country Link
JP (1) JPS6315040U (enrdf_load_stackoverflow)

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