JPS61142445U - - Google Patents

Info

Publication number
JPS61142445U
JPS61142445U JP2682785U JP2682785U JPS61142445U JP S61142445 U JPS61142445 U JP S61142445U JP 2682785 U JP2682785 U JP 2682785U JP 2682785 U JP2682785 U JP 2682785U JP S61142445 U JPS61142445 U JP S61142445U
Authority
JP
Japan
Prior art keywords
processing container
annealing
wafer holder
view
divided
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2682785U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2682785U priority Critical patent/JPS61142445U/ja
Publication of JPS61142445U publication Critical patent/JPS61142445U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Furnace Details (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
JP2682785U 1985-02-25 1985-02-25 Pending JPS61142445U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2682785U JPS61142445U (enrdf_load_stackoverflow) 1985-02-25 1985-02-25

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2682785U JPS61142445U (enrdf_load_stackoverflow) 1985-02-25 1985-02-25

Publications (1)

Publication Number Publication Date
JPS61142445U true JPS61142445U (enrdf_load_stackoverflow) 1986-09-03

Family

ID=30523200

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2682785U Pending JPS61142445U (enrdf_load_stackoverflow) 1985-02-25 1985-02-25

Country Status (1)

Country Link
JP (1) JPS61142445U (enrdf_load_stackoverflow)

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