JPS62118427U - - Google Patents

Info

Publication number
JPS62118427U
JPS62118427U JP600686U JP600686U JPS62118427U JP S62118427 U JPS62118427 U JP S62118427U JP 600686 U JP600686 U JP 600686U JP 600686 U JP600686 U JP 600686U JP S62118427 U JPS62118427 U JP S62118427U
Authority
JP
Japan
Prior art keywords
wafer
storage section
stores
jig
reaction tube
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP600686U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP600686U priority Critical patent/JPS62118427U/ja
Publication of JPS62118427U publication Critical patent/JPS62118427U/ja
Pending legal-status Critical Current

Links

JP600686U 1986-01-20 1986-01-20 Pending JPS62118427U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP600686U JPS62118427U (enrdf_load_stackoverflow) 1986-01-20 1986-01-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP600686U JPS62118427U (enrdf_load_stackoverflow) 1986-01-20 1986-01-20

Publications (1)

Publication Number Publication Date
JPS62118427U true JPS62118427U (enrdf_load_stackoverflow) 1987-07-28

Family

ID=30788113

Family Applications (1)

Application Number Title Priority Date Filing Date
JP600686U Pending JPS62118427U (enrdf_load_stackoverflow) 1986-01-20 1986-01-20

Country Status (1)

Country Link
JP (1) JPS62118427U (enrdf_load_stackoverflow)

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