JPH01153631U - - Google Patents

Info

Publication number
JPH01153631U
JPH01153631U JP4493788U JP4493788U JPH01153631U JP H01153631 U JPH01153631 U JP H01153631U JP 4493788 U JP4493788 U JP 4493788U JP 4493788 U JP4493788 U JP 4493788U JP H01153631 U JPH01153631 U JP H01153631U
Authority
JP
Japan
Prior art keywords
wafer
reaction tube
heat treatment
magnetic body
attached
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4493788U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4493788U priority Critical patent/JPH01153631U/ja
Publication of JPH01153631U publication Critical patent/JPH01153631U/ja
Pending legal-status Critical Current

Links

JP4493788U 1988-04-01 1988-04-01 Pending JPH01153631U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4493788U JPH01153631U (enrdf_load_stackoverflow) 1988-04-01 1988-04-01

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4493788U JPH01153631U (enrdf_load_stackoverflow) 1988-04-01 1988-04-01

Publications (1)

Publication Number Publication Date
JPH01153631U true JPH01153631U (enrdf_load_stackoverflow) 1989-10-23

Family

ID=31271270

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4493788U Pending JPH01153631U (enrdf_load_stackoverflow) 1988-04-01 1988-04-01

Country Status (1)

Country Link
JP (1) JPH01153631U (enrdf_load_stackoverflow)

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