JPS63127122U - - Google Patents

Info

Publication number
JPS63127122U
JPS63127122U JP18219386U JP18219386U JPS63127122U JP S63127122 U JPS63127122 U JP S63127122U JP 18219386 U JP18219386 U JP 18219386U JP 18219386 U JP18219386 U JP 18219386U JP S63127122 U JPS63127122 U JP S63127122U
Authority
JP
Japan
Prior art keywords
furnace tube
heat treatment
semiconductor wafer
wafer jig
tube
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18219386U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP18219386U priority Critical patent/JPS63127122U/ja
Publication of JPS63127122U publication Critical patent/JPS63127122U/ja
Pending legal-status Critical Current

Links

JP18219386U 1986-11-27 1986-11-27 Pending JPS63127122U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18219386U JPS63127122U (enrdf_load_stackoverflow) 1986-11-27 1986-11-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18219386U JPS63127122U (enrdf_load_stackoverflow) 1986-11-27 1986-11-27

Publications (1)

Publication Number Publication Date
JPS63127122U true JPS63127122U (enrdf_load_stackoverflow) 1988-08-19

Family

ID=31127762

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18219386U Pending JPS63127122U (enrdf_load_stackoverflow) 1986-11-27 1986-11-27

Country Status (1)

Country Link
JP (1) JPS63127122U (enrdf_load_stackoverflow)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61114522A (ja) * 1984-11-09 1986-06-02 Hitachi Ltd 半導体ウエハ加熱装置
JPS61161711A (ja) * 1985-01-11 1986-07-22 Denkoo:Kk 半導体の熱処理方法及び熱処理装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61114522A (ja) * 1984-11-09 1986-06-02 Hitachi Ltd 半導体ウエハ加熱装置
JPS61161711A (ja) * 1985-01-11 1986-07-22 Denkoo:Kk 半導体の熱処理方法及び熱処理装置

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