JPH01143123U - - Google Patents
Info
- Publication number
- JPH01143123U JPH01143123U JP3939888U JP3939888U JPH01143123U JP H01143123 U JPH01143123 U JP H01143123U JP 3939888 U JP3939888 U JP 3939888U JP 3939888 U JP3939888 U JP 3939888U JP H01143123 U JPH01143123 U JP H01143123U
- Authority
- JP
- Japan
- Prior art keywords
- etching
- electrode
- voltmeter
- digital multimeter
- computer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005530 etching Methods 0.000 claims description 9
- 230000000903 blocking effect Effects 0.000 claims description 2
- 239000003990 capacitor Substances 0.000 claims description 2
- 238000001020 plasma etching Methods 0.000 claims description 2
- 238000012806 monitoring device Methods 0.000 claims 1
- 238000012544 monitoring process Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 5
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3939888U JPH01143123U (enExample) | 1988-03-25 | 1988-03-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3939888U JPH01143123U (enExample) | 1988-03-25 | 1988-03-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01143123U true JPH01143123U (enExample) | 1989-10-02 |
Family
ID=31265903
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3939888U Pending JPH01143123U (enExample) | 1988-03-25 | 1988-03-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01143123U (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006054148A (ja) * | 2004-08-16 | 2006-02-23 | Hitachi High-Technologies Corp | プラズマ処理装置 |
-
1988
- 1988-03-25 JP JP3939888U patent/JPH01143123U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006054148A (ja) * | 2004-08-16 | 2006-02-23 | Hitachi High-Technologies Corp | プラズマ処理装置 |
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