JPH01133737U - - Google Patents

Info

Publication number
JPH01133737U
JPH01133737U JP3052188U JP3052188U JPH01133737U JP H01133737 U JPH01133737 U JP H01133737U JP 3052188 U JP3052188 U JP 3052188U JP 3052188 U JP3052188 U JP 3052188U JP H01133737 U JPH01133737 U JP H01133737U
Authority
JP
Japan
Prior art keywords
wafer
cassette
cassettes
wafer cassettes
rotary table
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3052188U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3052188U priority Critical patent/JPH01133737U/ja
Publication of JPH01133737U publication Critical patent/JPH01133737U/ja
Pending legal-status Critical Current

Links

JP3052188U 1988-03-07 1988-03-07 Pending JPH01133737U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3052188U JPH01133737U (enrdf_load_stackoverflow) 1988-03-07 1988-03-07

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3052188U JPH01133737U (enrdf_load_stackoverflow) 1988-03-07 1988-03-07

Publications (1)

Publication Number Publication Date
JPH01133737U true JPH01133737U (enrdf_load_stackoverflow) 1989-09-12

Family

ID=31255646

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3052188U Pending JPH01133737U (enrdf_load_stackoverflow) 1988-03-07 1988-03-07

Country Status (1)

Country Link
JP (1) JPH01133737U (enrdf_load_stackoverflow)

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