JPH01130538U - - Google Patents
Info
- Publication number
- JPH01130538U JPH01130538U JP2700488U JP2700488U JPH01130538U JP H01130538 U JPH01130538 U JP H01130538U JP 2700488 U JP2700488 U JP 2700488U JP 2700488 U JP2700488 U JP 2700488U JP H01130538 U JPH01130538 U JP H01130538U
- Authority
- JP
- Japan
- Prior art keywords
- boat
- wafer
- semiconductor wafer
- semiconductor
- sensor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 235000012431 wafers Nutrition 0.000 claims description 22
- 239000004065 semiconductor Substances 0.000 claims description 13
- 239000011295 pitch Substances 0.000 claims 3
- 238000010586 diagram Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2700488U JPH0249717Y2 (enExample) | 1988-02-29 | 1988-02-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2700488U JPH0249717Y2 (enExample) | 1988-02-29 | 1988-02-29 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01130538U true JPH01130538U (enExample) | 1989-09-05 |
| JPH0249717Y2 JPH0249717Y2 (enExample) | 1990-12-27 |
Family
ID=31249133
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2700488U Expired JPH0249717Y2 (enExample) | 1988-02-29 | 1988-02-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0249717Y2 (enExample) |
-
1988
- 1988-02-29 JP JP2700488U patent/JPH0249717Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0249717Y2 (enExample) | 1990-12-27 |
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