JPH01130536U - - Google Patents
Info
- Publication number
- JPH01130536U JPH01130536U JP2700288U JP2700288U JPH01130536U JP H01130536 U JPH01130536 U JP H01130536U JP 2700288 U JP2700288 U JP 2700288U JP 2700288 U JP2700288 U JP 2700288U JP H01130536 U JPH01130536 U JP H01130536U
- Authority
- JP
- Japan
- Prior art keywords
- pusher
- carrier
- pushers
- semiconductor wafers
- view
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 235000012431 wafers Nutrition 0.000 claims description 8
- 239000004065 semiconductor Substances 0.000 claims description 6
- 238000001514 detection method Methods 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2700288U JPH0537475Y2 (enExample) | 1988-02-29 | 1988-02-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2700288U JPH0537475Y2 (enExample) | 1988-02-29 | 1988-02-29 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01130536U true JPH01130536U (enExample) | 1989-09-05 |
| JPH0537475Y2 JPH0537475Y2 (enExample) | 1993-09-22 |
Family
ID=31249129
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2700288U Expired - Lifetime JPH0537475Y2 (enExample) | 1988-02-29 | 1988-02-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0537475Y2 (enExample) |
-
1988
- 1988-02-29 JP JP2700288U patent/JPH0537475Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0537475Y2 (enExample) | 1993-09-22 |
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