JPH0388342U - - Google Patents
Info
- Publication number
- JPH0388342U JPH0388342U JP15051389U JP15051389U JPH0388342U JP H0388342 U JPH0388342 U JP H0388342U JP 15051389 U JP15051389 U JP 15051389U JP 15051389 U JP15051389 U JP 15051389U JP H0388342 U JPH0388342 U JP H0388342U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- cassette
- sensor
- wafers
- transfer robot
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003028 elevating effect Effects 0.000 claims description 3
- 235000012431 wafers Nutrition 0.000 claims 16
- 238000001514 detection method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15051389U JPH0388342U (enExample) | 1989-12-26 | 1989-12-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15051389U JPH0388342U (enExample) | 1989-12-26 | 1989-12-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0388342U true JPH0388342U (enExample) | 1991-09-10 |
Family
ID=31696860
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15051389U Pending JPH0388342U (enExample) | 1989-12-26 | 1989-12-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0388342U (enExample) |
-
1989
- 1989-12-26 JP JP15051389U patent/JPH0388342U/ja active Pending
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