JPH0369239U - - Google Patents
Info
- Publication number
- JPH0369239U JPH0369239U JP13019989U JP13019989U JPH0369239U JP H0369239 U JPH0369239 U JP H0369239U JP 13019989 U JP13019989 U JP 13019989U JP 13019989 U JP13019989 U JP 13019989U JP H0369239 U JPH0369239 U JP H0369239U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- support stand
- pusher
- reading device
- map reading
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000969 carrier Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13019989U JPH0369239U (enExample) | 1989-11-08 | 1989-11-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13019989U JPH0369239U (enExample) | 1989-11-08 | 1989-11-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0369239U true JPH0369239U (enExample) | 1991-07-09 |
Family
ID=31677789
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13019989U Pending JPH0369239U (enExample) | 1989-11-08 | 1989-11-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0369239U (enExample) |
-
1989
- 1989-11-08 JP JP13019989U patent/JPH0369239U/ja active Pending
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