JPH01130321A - 磁気ディスクの製造方法 - Google Patents
磁気ディスクの製造方法Info
- Publication number
- JPH01130321A JPH01130321A JP62289778A JP28977887A JPH01130321A JP H01130321 A JPH01130321 A JP H01130321A JP 62289778 A JP62289778 A JP 62289778A JP 28977887 A JP28977887 A JP 28977887A JP H01130321 A JPH01130321 A JP H01130321A
- Authority
- JP
- Japan
- Prior art keywords
- film
- targets
- particles
- magnetic
- disk
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 13
- 239000000758 substrate Substances 0.000 claims abstract description 22
- 238000004544 sputter deposition Methods 0.000 claims description 11
- 230000001681 protective effect Effects 0.000 claims description 7
- 239000002245 particle Substances 0.000 abstract description 32
- 239000010408 film Substances 0.000 description 82
- 238000001755 magnetron sputter deposition Methods 0.000 description 8
- 238000013459 approach Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16H—GEARING
- F16H61/00—Control functions within control units of change-speed- or reversing-gearings for conveying rotary motion ; Control of exclusively fluid gearing, friction gearing, gearings with endless flexible members or other particular types of gearing
- F16H61/66—Control functions within control units of change-speed- or reversing-gearings for conveying rotary motion ; Control of exclusively fluid gearing, friction gearing, gearings with endless flexible members or other particular types of gearing specially adapted for continuously variable gearings
- F16H61/662—Control functions within control units of change-speed- or reversing-gearings for conveying rotary motion ; Control of exclusively fluid gearing, friction gearing, gearings with endless flexible members or other particular types of gearing specially adapted for continuously variable gearings with endless flexible members
- F16H61/66254—Control functions within control units of change-speed- or reversing-gearings for conveying rotary motion ; Control of exclusively fluid gearing, friction gearing, gearings with endless flexible members or other particular types of gearing specially adapted for continuously variable gearings with endless flexible members controlling of shifting being influenced by a signal derived from the engine and the main coupling
- F16H61/66259—Control functions within control units of change-speed- or reversing-gearings for conveying rotary motion ; Control of exclusively fluid gearing, friction gearing, gearings with endless flexible members or other particular types of gearing specially adapted for continuously variable gearings with endless flexible members controlling of shifting being influenced by a signal derived from the engine and the main coupling using electrical or electronical sensing or control means
Landscapes
- Magnetic Record Carriers (AREA)
- Manufacturing Of Magnetic Record Carriers (AREA)
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62289778A JPH01130321A (ja) | 1987-11-17 | 1987-11-17 | 磁気ディスクの製造方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62289778A JPH01130321A (ja) | 1987-11-17 | 1987-11-17 | 磁気ディスクの製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH01130321A true JPH01130321A (ja) | 1989-05-23 |
JPH0450652B2 JPH0450652B2 (enrdf_load_stackoverflow) | 1992-08-14 |
Family
ID=17747637
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62289778A Granted JPH01130321A (ja) | 1987-11-17 | 1987-11-17 | 磁気ディスクの製造方法 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH01130321A (enrdf_load_stackoverflow) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0249215A (ja) * | 1988-05-27 | 1990-02-19 | Hitachi Ltd | 磁気記録媒体 |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5977621A (ja) * | 1982-10-26 | 1984-05-04 | Matsushita Electric Ind Co Ltd | 垂直磁気記録媒体 |
JPS61196430A (ja) * | 1985-02-27 | 1986-08-30 | Toshiba Corp | 磁気記録媒体の製造方法 |
JPS629526A (ja) * | 1985-07-02 | 1987-01-17 | リン・デ−タ・コ−ポレ−シヨン | デイスクの媒体 |
JPS63131317A (ja) * | 1986-11-20 | 1988-06-03 | Matsushita Electric Ind Co Ltd | 磁気記録媒体 |
JPS63211121A (ja) * | 1987-02-27 | 1988-09-02 | Hitachi Ltd | 多層薄膜の製造方法 |
JPS6414715A (en) * | 1987-07-08 | 1989-01-18 | Fuji Electric Co Ltd | Magnetic recording medium |
-
1987
- 1987-11-17 JP JP62289778A patent/JPH01130321A/ja active Granted
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5977621A (ja) * | 1982-10-26 | 1984-05-04 | Matsushita Electric Ind Co Ltd | 垂直磁気記録媒体 |
JPS61196430A (ja) * | 1985-02-27 | 1986-08-30 | Toshiba Corp | 磁気記録媒体の製造方法 |
JPS629526A (ja) * | 1985-07-02 | 1987-01-17 | リン・デ−タ・コ−ポレ−シヨン | デイスクの媒体 |
JPS63131317A (ja) * | 1986-11-20 | 1988-06-03 | Matsushita Electric Ind Co Ltd | 磁気記録媒体 |
JPS63211121A (ja) * | 1987-02-27 | 1988-09-02 | Hitachi Ltd | 多層薄膜の製造方法 |
JPS6414715A (en) * | 1987-07-08 | 1989-01-18 | Fuji Electric Co Ltd | Magnetic recording medium |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0249215A (ja) * | 1988-05-27 | 1990-02-19 | Hitachi Ltd | 磁気記録媒体 |
Also Published As
Publication number | Publication date |
---|---|
JPH0450652B2 (enrdf_load_stackoverflow) | 1992-08-14 |
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Legal Events
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