JPH01121708A - 形状測定装置 - Google Patents

形状測定装置

Info

Publication number
JPH01121708A
JPH01121708A JP27970387A JP27970387A JPH01121708A JP H01121708 A JPH01121708 A JP H01121708A JP 27970387 A JP27970387 A JP 27970387A JP 27970387 A JP27970387 A JP 27970387A JP H01121708 A JPH01121708 A JP H01121708A
Authority
JP
Japan
Prior art keywords
light
order
intensity
zero
image sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP27970387A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0563721B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
Shinichi Wakatake
伸一 若竹
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP27970387A priority Critical patent/JPH01121708A/ja
Publication of JPH01121708A publication Critical patent/JPH01121708A/ja
Publication of JPH0563721B2 publication Critical patent/JPH0563721B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)
  • Manufacturing Optical Record Carriers (AREA)
JP27970387A 1987-11-04 1987-11-04 形状測定装置 Granted JPH01121708A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP27970387A JPH01121708A (ja) 1987-11-04 1987-11-04 形状測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP27970387A JPH01121708A (ja) 1987-11-04 1987-11-04 形状測定装置

Publications (2)

Publication Number Publication Date
JPH01121708A true JPH01121708A (ja) 1989-05-15
JPH0563721B2 JPH0563721B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-09-13

Family

ID=17614700

Family Applications (1)

Application Number Title Priority Date Filing Date
JP27970387A Granted JPH01121708A (ja) 1987-11-04 1987-11-04 形状測定装置

Country Status (1)

Country Link
JP (1) JPH01121708A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07302441A (ja) * 1994-04-30 1995-11-14 Nec Corp 溝形状測定装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07302441A (ja) * 1994-04-30 1995-11-14 Nec Corp 溝形状測定装置

Also Published As

Publication number Publication date
JPH0563721B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-09-13

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