JPH01110256U - - Google Patents
Info
- Publication number
- JPH01110256U JPH01110256U JP278888U JP278888U JPH01110256U JP H01110256 U JPH01110256 U JP H01110256U JP 278888 U JP278888 U JP 278888U JP 278888 U JP278888 U JP 278888U JP H01110256 U JPH01110256 U JP H01110256U
- Authority
- JP
- Japan
- Prior art keywords
- crucible
- thin film
- support
- spacer
- forming
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 125000006850 spacer group Chemical group 0.000 claims description 3
- 239000000463 material Substances 0.000 claims 3
- 239000010409 thin film Substances 0.000 claims 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims 1
- 229910052799 carbon Inorganic materials 0.000 claims 1
- 238000001704 evaporation Methods 0.000 claims 1
- 238000010438 heat treatment Methods 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 claims 1
- 239000002184 metal Substances 0.000 claims 1
- 239000000758 substrate Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Description
第１図は本考案の一実施例の蒸着装置の部分構
成図である。 １……るつぼ、２……スペーサ、３……支柱。
成図である。 １……るつぼ、２……スペーサ、３……支柱。
Claims (1)
- 薄膜形成材料をるつぼの中で加熱することによ
り蒸発させ、この材料の薄膜を基板表面に形成す
る装置において、カーボン製の前記るつぼとこの
るつぼを支持する金属製の支持体の間にこの支持
体と同一材質のスペーサを介在させると共に、ス
ペーサと支持体を嵌合結合することを特徴とする
薄膜製造装置。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP278888U JPH0527485Y2 (ja) | 1988-01-13 | 1988-01-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP278888U JPH0527485Y2 (ja) | 1988-01-13 | 1988-01-13 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01110256U true JPH01110256U (ja) | 1989-07-25 |
| JPH0527485Y2 JPH0527485Y2 (ja) | 1993-07-13 |
Family
ID=31506636
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP278888U Expired - Lifetime JPH0527485Y2 (ja) | 1988-01-13 | 1988-01-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0527485Y2 (ja) |
-
1988
- 1988-01-13 JP JP278888U patent/JPH0527485Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0527485Y2 (ja) | 1993-07-13 |