JPH0110924Y2 - - Google Patents
Info
- Publication number
- JPH0110924Y2 JPH0110924Y2 JP1981096861U JP9686181U JPH0110924Y2 JP H0110924 Y2 JPH0110924 Y2 JP H0110924Y2 JP 1981096861 U JP1981096861 U JP 1981096861U JP 9686181 U JP9686181 U JP 9686181U JP H0110924 Y2 JPH0110924 Y2 JP H0110924Y2
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- processing liquid
- supplied
- supply port
- mounting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000007788 liquid Substances 0.000 claims description 17
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 10
- 230000002265 prevention Effects 0.000 claims description 3
- 235000012431 wafers Nutrition 0.000 description 29
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 239000005368 silicate glass Substances 0.000 description 1
- 238000011282 treatment Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Landscapes
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9686181U JPS585342U (ja) | 1981-06-30 | 1981-06-30 | ウェハ−表面処理装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9686181U JPS585342U (ja) | 1981-06-30 | 1981-06-30 | ウェハ−表面処理装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS585342U JPS585342U (ja) | 1983-01-13 |
| JPH0110924Y2 true JPH0110924Y2 (US20110009641A1-20110113-C00185.png) | 1989-03-29 |
Family
ID=29891688
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9686181U Granted JPS585342U (ja) | 1981-06-30 | 1981-06-30 | ウェハ−表面処理装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS585342U (US20110009641A1-20110113-C00185.png) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61129283U (US20110009641A1-20110113-C00185.png) * | 1985-02-01 | 1986-08-13 | ||
| JPH0143863Y2 (US20110009641A1-20110113-C00185.png) * | 1985-04-24 | 1989-12-19 | ||
| JPS63135774U (US20110009641A1-20110113-C00185.png) * | 1987-02-26 | 1988-09-06 |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5042698U (US20110009641A1-20110113-C00185.png) * | 1973-08-17 | 1975-04-30 | ||
| JPS55124232A (en) * | 1979-03-20 | 1980-09-25 | Matsushita Electric Ind Co Ltd | Application method of substrate treatment solution and the device therefor |
| JPS5660021A (en) * | 1979-10-19 | 1981-05-23 | Fujitsu Ltd | Etching for semiconductor device |
-
1981
- 1981-06-30 JP JP9686181U patent/JPS585342U/ja active Granted
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5042698U (US20110009641A1-20110113-C00185.png) * | 1973-08-17 | 1975-04-30 | ||
| JPS55124232A (en) * | 1979-03-20 | 1980-09-25 | Matsushita Electric Ind Co Ltd | Application method of substrate treatment solution and the device therefor |
| JPS5660021A (en) * | 1979-10-19 | 1981-05-23 | Fujitsu Ltd | Etching for semiconductor device |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS585342U (ja) | 1983-01-13 |
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